Sun Quanquan, Tang Jiaxuan, Shen Lifeng, Lan Jie, Shen Zhenfeng, Xiao Junfeng, Chen Xiao, Zhang Jianguo, Wu Yu, Xu Jianfeng, Wang Xuefang
Shanghai Aerospace Control Technology Institute, Shanghai 201109, China.
State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines (Basel). 2022 Jun 6;13(6):899. doi: 10.3390/mi13060899.
In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold was carried out by perfluorooctyl phosphoric acid (PFOPA) liquid deposition. Through the orthogonal experiment of hot embossing with the treated mold and subsequent inductively coupled plasma (ICP) etching, the microstructure of MLA was transferred to the silicon substrate, with a root mean square error of 17.7 nm and a roughness of 12.1 nm Sa. The average fitted radius of the microlens array units is 406.145 µm, which is 1.54% different from the design radius.
本文提出了一种高精度、低成本、批量处理的纳米压印方法来加工球面微透镜阵列（MLA）。采用单点金刚石车削加工出具有高表面精度和低表面粗糙度的纳米压印模具。通过全氟辛基磷酸（PFOPA）液体沉积对模具进行防粘处理。利用处理后的模具进行热压印及后续电感耦合等离子体（ICP）蚀刻的正交试验，将MLA的微观结构转移到硅衬底上，均方根误差为17.7nm，粗糙度为12.1nm Sa。微透镜阵列单元的平均拟合半径为406.145µm，与设计半径相差1.54%。
