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采用无蚀刻工艺集成片上钙钛矿纳米晶体激光器和长程表面等离激元极化激元波导。

Integration of on-chip perovskite nanocrystal laser and long-range surface plasmon polariton waveguide with etching-free process.

作者信息

Lin Hsin-Chang, Lee Yang-Chun, Lin Cheng-Chieh, Ho Ya-Lun, Xing Di, Chen Mu-Hsin, Lin Bo-Wei, Chen Li-Yin, Chen Chun-Wei, Delaunay Jean-Jacques

机构信息

School of Engineering, The University of Tokyo, Tokyo 113-8656, Japan.

Department of Photonics, National Sun Yat-sen University, Kaohsiung 80424, Taiwan.

出版信息

Nanoscale. 2022 Jul 21;14(28):10075-10081. doi: 10.1039/d2nr01611g.

Abstract

Perovskite materials prepared in the form of solution-processed nanocrystals and used in top-down fabrication techniques are very attractive to develop low-cost and high-quality integrated optoelectronic circuits. Particularly, integrated miniaturized coherent light sources that can be connected to light-guiding structures on a chip are highly desired. To control light propagating on a small footprint with low-loss optical modes, long-range surface plasmon polariton (LRSPP) waveguides are employed. Herein, we demonstrate an on-chip fabricated photonic-plasmonic hybrid system consisting of a perovskite lasing structure coupled to an LRSPP waveguide achieving a low lasing threshold and a propagation length over 100 μm. Preventing perovskite material degradation and the formation of surface roughness of the laser cavity during fabrication is made possible by designing a fabrication technique without any etching step.

摘要

以溶液处理的纳米晶体形式制备并用于自上而下制造技术的钙钛矿材料,对于开发低成本、高质量的集成光电器件极具吸引力。特别是,非常需要能够连接到芯片上导光结构的集成微型相干光源。为了以低损耗光学模式控制在小面积上传播的光,采用了长程表面等离激元极化激元(LRSPP)波导。在此,我们展示了一种片上制造的光子 - 等离子体混合系统,该系统由与LRSPP波导耦合的钙钛矿激光结构组成,实现了低激光阈值和超过100μm的传播长度。通过设计一种无需任何蚀刻步骤的制造技术,可以防止钙钛矿材料在制造过程中降解以及激光腔表面粗糙度的形成。

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