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基于超薄硅酸盐玻璃的广角短波通薄膜的研制

Development of Wide-Angle Short-Wave Pass Thin Film Based on the Ultra-Thin Silicate Glass.

作者信息

Fu Xiuhua, Dong Suotao, Xiong Shifu, Li Cheng, Chen Xiaodong

机构信息

School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130013, China.

Institute of Functional Crystals, Tianjin University of Technology, Tianjin 300382, China.

出版信息

Materials (Basel). 2022 Jul 5;15(13):4706. doi: 10.3390/ma15134706.

Abstract

With the rapid development of laser medicine, there are higher requirements placed on the performance of optical components in various medical systems. This paper is aimed at exploring the critical optical devices of medical equipment for treating periodontitis and gingivitis. The cathode sputtering method was used to produce the wide-angle short-wave pass filter, and a hundreds grid fastness test was conducted to detect the occurrence of film peeling. Considering the results of SEM, transmission spectrum, and stress test of the sample, an analysis was conducted as to the cause of poor bonding force for the film. By increasing the amount of argon gas and adjusting the baking temperature, the problem of film peeling was resolved. Besides, a short-wave pass filter film with good bonding and low roughness was obtained to meet the requirements of laser medical equipment.

摘要

随着激光医学的快速发展,对各种医疗系统中光学元件的性能有了更高的要求。本文旨在探索用于治疗牙周炎和牙龈炎的医疗设备的关键光学器件。采用阴极溅射法制备广角短波通滤光片,并进行了数百次网格牢固性测试以检测膜层剥落的情况。结合样品的扫描电子显微镜(SEM)结果、透射光谱和应力测试结果,对膜层结合力差的原因进行了分析。通过增加氩气含量和调整烘烤温度,解决了膜层剥落问题。此外,还获得了结合力良好且粗糙度低的短波通滤光膜,以满足激光医疗设备的要求。

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