Wang Dazhi, Abbas Zeshan, Lu Liangkun, Liang Shiwen, Zhao Xiangyu, Xu Pengfei, Zhao Kuipeng, Suo Liujia, Cui Yan, Yin Penghe, Tang Bin, Xie Jin, Yang Yong, Liang Junsheng
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China.
Ningbo Institute, Dalian University of Technology, Ningbo 315000, China.
Polymers (Basel). 2022 Jun 30;14(13):2683. doi: 10.3390/polym14132683.
The fabrication of various micro-patterns on polymer insulating substrates is a current requirement in micro-electromechanical system (MEMS) and packaging sectors. In this paper, we use electrohydrodynamic jet (E-Jet) printing to create multifaceted and stable micro-patterns on a polyethylene terephthalate (PET) substrate. Initially, simulation was performed to investigate optimized printing settings in phase field physics for the usage of two distinct functional inks. A series of simulation experiments was conducted, and it was determined that the following parameters are optimised: applied pressure of 40 kPa, high pulse voltage of 1.95 kV, low dc voltage of 1.60 kV, duty cycle of 80%, pulse frequency of 60 Hz, printing height of 0.25 mm, and printing speed of 1 mm/s. Then, experiments showed that adjusting a pressure value of 40 kPa and regulating the SEMICOSIL988/1 K ink to print micro-drops on a polymer substrate with a thickness of 1 mm prevents coffee staining. The smallest measured droplet size was 200 μm. Furthermore, underfill (UF 3808) ink was driven with applied pressure to 50 kPa while other parameters were left constant, and the minimum size of linear patterns was printed to 105 μm on 0.5-mm-thick PET substrate. During the micro-drip and cone-jet regimes, the consistency and diameter of printed micro-structures were accurately regulated at a pulse frequency of 60 Hz and a duty cycle of 80%.
在聚合物绝缘基板上制造各种微图案是微机电系统(MEMS)和封装领域当前的需求。在本文中,我们使用电液动力喷射(E-Jet)打印在聚对苯二甲酸乙二醇酯(PET)基板上创建多面且稳定的微图案。最初,进行了模拟以研究相场物理中针对两种不同功能墨水使用的优化打印设置。进行了一系列模拟实验,确定了以下优化参数:施加压力40 kPa、高脉冲电压1.95 kV、低直流电压1.60 kV、占空比80%、脉冲频率60 Hz、打印高度0.25 mm以及打印速度1 mm/s。然后,实验表明,将压力值调整为40 kPa并调节SEMICOSIL988/1 K墨水,以便在厚度为1 mm的聚合物基板上打印微滴,可以防止咖啡渍现象。测量到的最小液滴尺寸为200μm。此外,在其他参数保持不变的情况下,将施加压力驱动底部填充(UF 3808)墨水至50 kPa,在0.5 mm厚的PET基板上打印出的线性图案最小尺寸为105μm。在微滴和锥射流模式下,可以在脉冲频率60 Hz和占空比80%时精确调节打印微结构的一致性和直径。