Toropov Mikhail, Chkhalo Nikolay, Malyshev Ilya, Salashchenko Nikolay
Opt Lett. 2022 Jul 15;47(14):3459-3462. doi: 10.1364/OL.460708.
A high-aperture low-coherence interferometer with a diffraction reference wave based on a tipped single-mode optical fiber was proposed and investigated. Due to the usage of the central least-aberrated region of the diffracted wavefront, the interferometer comprise record working aperture among known PDIs. The interferometer makes it possible to study samples with a reflectance that varies over a wide range. A demonstration of the use of this interferometer for high-precision measurements of a spherical mirror is presented. Sub-nanometer reproducibility of measurements in terms of the peak to valley (PV) parameter and sub-angstrom reproducibility in terms of the rms are demonstrated.
提出并研究了一种基于倾斜单模光纤的具有衍射参考波的高孔径低相干干涉仪。由于使用了衍射波前的中心最小像差区域，该干涉仪在已知的点衍射干涉仪中具有创纪录的工作孔径。该干涉仪能够研究反射率在很宽范围内变化的样品。展示了使用这种干涉仪对球面镜进行高精度测量的情况。在峰谷（PV）参数方面展示了亚纳米级的测量重复性，在均方根（rms）方面展示了亚埃级的重复性。
