Liu Zhaoyue, Zeng Lina, Xu Ke, Li Zaijin, Chen Hao, Qiao Zhongliang, Qu Yi, Liu Guojun, Li Lin
Key Laboratory of Laser Technology and Optoelectronic Functional Materials of Hainan Province, College of Physics and Eletronic Engineering, Hainan Normal University, Haikou 571158, China.
Sensors (Basel). 2022 Jul 7;22(14):5096. doi: 10.3390/s22145096.
In this paper, a pressure sensor based on a metal diaphragm and lever structure is designed, the sensing principle and mechanical structure of this sensor are analyzed and simulated, and its sensitization effectiveness and temperature compensation are verified. The maximum deflections of metal diaphragms of different sizes and materials were compared, and it was found that the square beryllium bronze diaphragm with a thickness of 1 mm and a side length of 20 mm had good elastic properties. The influence of the FBG in different positions of the lever on the center wavelength is analyzed. The sensitivity of the bare FBG is markedly improved under the influence of the two structures of the square elastic diaphragm and the lever, with a typical pressure sensitivity of 3.35 nm/MPa at 3 mm to the left of the lever center. The purpose of temperature compensation is achieved by adding another FBG that measures the temperature, and the sensing sensitivity can be tuned by adjusting the position of the FBG. It can meet the detection needs of a small range and high sensitivity.
本文设计了一种基于金属膜片和杠杆结构的压力传感器,对该传感器的传感原理和机械结构进行了分析与仿真,并验证了其增敏效果和温度补偿性能。比较了不同尺寸和材料的金属膜片的最大挠度,发现厚度为1mm、边长为20mm的方形铍青铜膜片具有良好的弹性性能。分析了光纤布拉格光栅(FBG)在杠杆不同位置对中心波长的影响。在方形弹性膜片和杠杆这两种结构的影响下,裸FBG的灵敏度显著提高,在杠杆中心左侧3mm处典型压力灵敏度为3.35nm/MPa。通过增加另一个测量温度的FBG实现温度补偿目的,并且可以通过调整FBG的位置来调节传感灵敏度。它能够满足小量程、高灵敏度的检测需求。