Graduate School of Science and Technology, Shizuoka University, Hamamatsu 432-8011, Japan.
Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok 16424, Indonesia.
Sensors (Basel). 2022 Jul 7;22(14):5107. doi: 10.3390/s22145107.
The antenna-coupled microbolometer with suspended titanium heater and thermistor was attractive as a terahertz (THz) detector due to its structural simplicity and low noise levels. In this study, we attempted to improve the responsivity and noise-equivalent power (NEP) of the THz detector by using high-resistance heater stacked on the meander thermistor. A wide range of heater resistances were prepared by changing the heater width and thickness. It was revealed that the electrical responsivity and NEP could be improved by increasing the heater's resistance. To make the best use of this improvement, a high-impedance folded dipole antenna was introduced, and the optical performance at 1 THz was found to be better than that of the conventional halfwave dipole antenna combined with a low-resistance heater. Both the electrical and optical measurement results indicated that the increase in heater resistance could reduce the thermal conductance in the detector, thus improved the responsivity and NEP even if the thermistor resistance was kept the same.
由于其结构简单和低噪声水平，天线耦合微测辐射热计与悬浮钛加热器和热敏电阻作为太赫兹 (THz) 探测器很有吸引力。在这项研究中，我们试图通过在曲折热敏电阻上堆叠高电阻加热器来提高 THz 探测器的响应率和噪声等效功率 (NEP)。通过改变加热器的宽度和厚度，可以制备出具有广泛电阻范围的加热器。结果表明，通过增加加热器的电阻可以提高电响应率和 NEP。为了充分利用这种改进，引入了高阻抗折叠偶极天线，在 1 THz 处的光学性能优于传统的半波偶极天线与低电阻加热器相结合的性能。电气和光学测量结果都表明，增加加热器的电阻可以降低探测器中的热导，从而提高响应率和 NEP，即使热敏电阻的电阻保持不变。
