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电极厚度对环形电极 QCM 传感器品质因数的影响。

Effect of Electrode Thickness on Quality Factor of Ring Electrode QCM Sensor.

机构信息

School of Integrated Circuits, Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.

School of Physics & Electronic Information Engineering, Henan Polytechnic University, Jiaozuo 454001, China.

出版信息

Sensors (Basel). 2022 Jul 9;22(14):5159. doi: 10.3390/s22145159.

Abstract

As a key type of sensor, the quartz crystal microbalance (QCM) has been widely used in many research areas. Recently, the ring electrode QCM sensor (R-QCM) with more uniform mass sensitivity has been reported. However, the quality factor (Q-factor) of the R-QCM has still not been studied, especially regarding the effect of electrode thickness on the Q-factor. Considering that the Q-factor is one of crucial parameter to the QCM and it is closely related to the output frequency stability of the QCM, we study the effect of different electrode thicknesses on the Q-factor of the R-QCM in this paper. On the other hand, we clarify the relationship between the electrode thickness and the Q-factor of the R-QCM. The measurement results show that the average Q-factor increases with increases in the thickness of ring electrodes generally; however, the resonance frequency of the QCM resonator decreases with increases in the thickness. The low half-bandwidth (2Γ < 1630 Hz) of the R-QCM shows that the frequency performance is good. Additionally, the R-QCM has a higher Q-factor (Q > 6000), which indicates that it has a higher frequency stability and can be applied in many research areas.

摘要

作为一种关键类型的传感器,石英晶体微天平(QCM)已被广泛应用于许多研究领域。最近,报道了具有更均匀质量灵敏度的环形电极 QCM 传感器(R-QCM)。然而,R-QCM 的品质因数(Q 因子)尚未得到研究,特别是关于电极厚度对 Q 因子的影响。考虑到 Q 因子是 QCM 的关键参数之一,并且与 QCM 的输出频率稳定性密切相关,我们在本文中研究了不同电极厚度对 R-QCM 的 Q 因子的影响。另一方面,我们阐明了电极厚度与 R-QCM 的 Q 因子之间的关系。测量结果表明,一般来说,环形电极厚度的增加会导致平均 Q 因子的增加;然而,QCM 谐振器的共振频率会随着厚度的增加而降低。R-QCM 的低半带宽(2Γ < 1630 Hz)表明其频率性能良好。此外,R-QCM 的 Q 因子较高(Q > 6000),这表明它具有更高的频率稳定性,可应用于许多研究领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4d7e/9320733/9c704c861fa3/sensors-22-05159-g001.jpg

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