石英晶体微天平质量灵敏度分布的研究进展：综述。

Advances in the Mass Sensitivity Distribution of Quartz Crystal Microbalances: A Review.

机构信息

School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

出版信息

Sensors (Basel). 2022 Jul 7;22(14):5112. doi: 10.3390/s22145112.

DOI:10.3390/s22145112

PMID:35890789

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9322161/

Abstract

A quartz crystal microbalance (QCM) is a typical acoustic transducer that undergoes a frequency shift due to changes in the mass of its surface. Its high sensitivity, robustness, small size design, and digital output have led to its widespread development for application in the fields of chemistry, physics, biology, medicine, and surface science. Mass sensitivity is one of the vital parameters and forms the basis for quantitative analysis using QCMs. This review firstly introduces the importance, definition, calculation, and measuring method of the mass sensitivity and then focuses on reviewing the influence of electrode parameters (including electrode shape, electrode diameter, electrode thickness, electrode material, etc.) on the mass sensitivity distribution of QCMs. Finally, the effect of the operating frequency on the mass sensitivity of QCMs is also analyzed.

摘要

石英晶体微天平（QCM）是一种典型的声学换能器，由于其表面质量的变化而发生频率位移。其高灵敏度、坚固耐用、小巧的设计和数字输出特性使其在化学、物理、生物、医学和表面科学等领域得到了广泛的发展和应用。质量灵敏度是 QCM 的重要参数之一，也是其定量分析的基础。本综述首先介绍了质量灵敏度的重要性、定义、计算和测量方法，然后重点回顾了电极参数（包括电极形状、电极直径、电极厚度、电极材料等）对 QCM 质量灵敏度分布的影响。最后，还分析了工作频率对 QCM 质量灵敏度的影响。