A High Temporal-Spatial Resolution Temperature Sensor for Simultaneous Measurement of Anisotropic Heat Flow.

The thermal measurement sensor applied to hypersonic vehicles requires characteristic size in the order of micrometers and characteristic time in the order of microseconds. The measurement criteria of localized detection, high temporal-spatial precision, and long-term stability cannot all be reached by current thermal measuring techniques. This work presents a temperature sensor with excellent temporal-spatial resolution that can measure both in-plane and out-of-plane heat flow. The sensor was made of thin platinum nano-film and an aluminum nitride ceramic sheet. The sensor was calibrated using a thermostatic vacuum chamber and used for in-plane and out-of-plane heat flow measurements. The temperature measurement accuracy of the sensor was estimated to be 0.01 K. The sensor's resolution for measuring heat flow density is more than 500 W/m and its measurement uncertainty is roughly 3%. To ensure the structural stability of the device, the aluminum nitride ceramic sheet was chosen as the substrate of the thermal sensing unit, and the response time became longer due to the high thermal conductivity of aluminum nitride. The suspension platinum nano-film sensor can reach a sub-microsecond response time according to the theoretical derivation. Experimental results of pneumatic thermal effects of high-temperature flames using the sensor prove that the designed sensor has good sensitivity and accuracy.