Azadi Kenari Shirin, Wiegerink Remco J, Veltkamp Henk-Willem, Sanders Remco G P, Lötters Joost C
Integrated Devices and Systems Group (IDS), University of Twente, 7522 NB Enschede, The Netherlands.
MESA+ Institute, 7522 NH Enschede, The Netherlands.
Micromachines (Basel). 2023 Jun 21;14(7):1280. doi: 10.3390/mi14071280.
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 μm in length, 5 μm in width, and 1.2 μm in thickness. The design theory and COMSOL simulation are discussed and compared with the measurement results. The sensor's efficacy is demonstrated with different gases, He, N, Ar, and CO, for thermal conductivity and thermal flow measurements. The sensor can accurately measure the thermal conductivity of various gases, including air, enabling correction of flow rate measurements based on the fluid type. The measured voltage from the thermal conductivity sensor for air corresponds to a calculated thermal conductivity of 0.02522 [W/m·K], with an error within 2.9%.
本文介绍了一种新型的与气体无关的热流量传感器芯片，该芯片具有三个量热式流量传感器，用于测量管内的流量分布和方向，还具有一个单线流量无关热导率传感器，能够通过简单的直流电压测量来识别气体类型。所有导线的尺寸均相同，长度为2000μm，宽度为5μm，厚度为1.2μm。讨论了设计理论并进行了COMSOL模拟，并与测量结果进行了比较。该传感器在热导率和热流量测量中，针对不同气体（氦气、氮气、氩气和一氧化碳）展示了其有效性。该传感器可以准确测量包括空气在内的各种气体的热导率，从而能够基于流体类型校正流量测量。空气的热导率传感器测得的电压对应于计算得出的热导率0.02522 [W/m·K]，误差在2.9%以内。
