IEEE Trans Ultrason Ferroelectr Freq Control. 2022 Oct;69(10):2984-2994. doi: 10.1109/TUFFC.2022.3198764. Epub 2022 Sep 27.
To determine all the material constants of a piezoelectric crystal using the IEEE resonance method or ultrasonic method, several samples with specific geometries and orientations are required, and the obtained results may be somewhat self-contradictory. The resonant ultrasound spectroscopy (RUS) can determine full material constants of a single piezoelectric sample by matching the numerically computed eigenfrequencies to the measured resonance spectrum. However, typically the usage of PZT transducers for excitation and reception makes the testing complicated and may add additional mass and damping. In this work, we propose a new method called partial electrode electromechanical impedance spectroscopy (PE-EMIS), which can obtain all the elastic, piezoelectric constants, and related internal frictions of a piezoelectric crystal by just using a single sample without additional transducers. In PE-EMIS, two small PEs are fabricated on one corner of a piezoelectric sample, and the sample's resonance frequencies, along with the internal frictions of the k th eigenmode, can be accurately obtained from the conductance spectrum measured using an impedance analyzer. The PE-EMIS experiment is carried out on a rectangular parallelepiped PZT-4 piezoelectric ceramic, and the extracted material constants are highly repeatable. Three of the extracted elastic constants ( c , c , and c ) are validated by the traditional wave propagation method. Due to its simplicity, convenience, and accuracy, the proposed PE-EMIS is expected to be widely used for characterization of piezoelectric materials in near future.
使用 IEEE 共振法或超声法确定压电晶体的所有材料常数,需要几个具有特定几何形状和取向的样品,并且得到的结果可能有些自相矛盾。共振超声光谱学 (RUS) 可以通过将数值计算的本征频率与测量的共振谱匹配,来确定单个压电样品的完整材料常数。然而,通常使用 PZT 换能器进行激励和接收会使测试变得复杂,并可能增加额外的质量和阻尼。在这项工作中,我们提出了一种称为部分电极机电阻抗谱 (PE-EMIS) 的新方法,该方法仅使用单个样品而无需额外的换能器即可获得压电晶体的所有弹性、压电常数和相关内耗。在 PE-EMIS 中,在压电样品的一个角上制造两个小 PE,并且可以从阻抗分析仪测量的电导谱中准确获得样品的共振频率以及第 k 个本征模的内耗。在矩形六方 PZT-4 压电陶瓷上进行了 PE-EMIS 实验,并且提取的材料常数具有高度的可重复性。三个提取的弹性常数( c 11 、 c 12 和 c 44 )通过传统的波传播方法进行了验证。由于其简单、方便和准确性,预计 PE-EMIS 将在不久的将来广泛用于压电材料的特性描述。