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通过部分电极机电阻抗谱测定的单α-石英晶体的弹性、压电系数和内耗

Elastic, Piezoelectric Coefficients, and Internal Frictions of a Single Alpha-Quartz Crystal Determined by Partial-Electrode Electromechanical Impedance Spectroscopy.

作者信息

Xie Mingyu, Bai Wenshuo, Li Faxin

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2023 Nov;70(11):1574-1584. doi: 10.1109/TUFFC.2023.3303426. Epub 2023 Nov 1.

Abstract

In this work, all independent elastic coefficients, piezoelectric coefficients, and internal frictions of a single alpha-quartz crystal are determined at room temperature using our recently proposed partial-electrode electromechanical impedance spectroscopy (PE-EMIS). In PE-EMIS, the rectangular parallelepiped quartz sample with two small partial electrodes fabricated on a corner is self-excited/sensed. The conductance spectrum (equivalent to the acoustic resonance spectrum) measured by an impedance analyzer under a free boundary condition is noiseless, allowing the first 100 eigenmodes ranging from 50 to 310 kHz to be accurately fit. To avoid mode misidentification, the off-plane displacement distributions of the quartz sample under different eigenmodes are determined using a scanned-laser vibrometer. The resonance spectrum measured by a traditional sandwich-like resonant ultrasound spectroscopy (RUS) apparatus is also presented for comparison, and the results show that the clamping force in sandwich-like RUS shifts the sample's resonance frequencies, causing 13% and 75% overestimations for the piezoelectric coefficients e11 and e14, respectively. In comparison with the RUS, our proposed PE-EMIS is more effective and convenient and will be widely used for characterization of piezoelectric crystals.

摘要

在本工作中,使用我们最近提出的部分电极机电阻抗谱(PE-EMIS)在室温下测定了单个α-石英晶体的所有独立弹性系数、压电系数和内耗。在PE-EMIS中,在一个角上制作了两个小部分电极的长方体石英样品会自激/自感。在自由边界条件下由阻抗分析仪测量的电导谱(等同于声共振谱)是无噪声的,这使得50至310kHz范围内的前100个本征模能够被精确拟合。为避免模式误识别,使用扫描激光测振仪确定了石英样品在不同本征模下的离面位移分布。还给出了用传统的三明治式共振超声谱(RUS)装置测量的共振谱用于比较,结果表明三明治式RUS中的夹持力会使样品的共振频率发生偏移,分别导致压电系数e11和e14被高估13%和75%。与RUS相比,我们提出的PE-EMIS更有效、更便捷,将被广泛用于压电晶体的表征。

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