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通过超高速同步加速器X射线衍射成像研究脆性断裂。

Brittle fracture studied by ultra-high-speed synchrotron X-ray diffraction imaging.

作者信息

Petit Antoine, Pokam Sylvia, Mazen Frederic, Tardif Samuel, Landru Didier, Kononchuk Oleg, Ben Mohamed Nadia, Olbinado Margie P, Rack Alexander, Rieutord Francois

机构信息

Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, F-38054 Grenoble, France.

Univ. Grenoble Alpes, CEA, IRIG-MEM-NRS, F-38000 Grenoble, France.

出版信息

J Appl Crystallogr. 2022 Jul 30;55(Pt 4):911-918. doi: 10.1107/S1600576722006537. eCollection 2022 Aug 1.

DOI:10.1107/S1600576722006537
PMID:35974730
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9348878/
Abstract

investigations of cracks propagating at up to 2.5 km s along an (001) plane of a silicon single crystal are reported, using X-ray diffraction megahertz imaging with intense and time-structured synchrotron radiation. The studied system is based on the Smart Cut process, where a buried layer in a material (typically Si) is weakened by microcracks and then used to drive a macroscopic crack (10 m) in a plane parallel to the surface with minimal deviation (10 m). A direct confirmation that the shape of the crack front is not affected by the distribution of the microcracks is provided. Instantaneous crack velocities over the centimetre-wide field of view were measured and showed an effect of local heating by the X-ray beam. The post-crack movements of the separated wafer parts could also be observed and explained using pneumatics and elasticity. A comprehensive view of controlled fracture propagation in a crystalline material is provided, paving the way for the measurement of ultra-fast strain field propagation.

摘要

报告了利用具有高强度和时间结构的同步加速器辐射的X射线衍射兆赫兹成像技术,对沿硅单晶(001)平面以高达2.5 km s的速度扩展的裂纹进行的研究。所研究的系统基于智能剥离工艺,其中材料(通常为硅)中的埋层通过微裂纹被削弱,然后用于在与表面平行的平面内驱动宏观裂纹(10 m),偏差最小(10 m)。直接证实了裂纹前沿的形状不受微裂纹分布的影响。测量了厘米级视场范围内的瞬时裂纹速度,并显示了X射线束的局部加热效应。还可以使用气体力学和弹性理论观察并解释分离的晶圆部分在裂纹后的运动。提供了对晶体材料中受控断裂扩展的全面视图,为超快应变场传播的测量铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/21f4b2b2dd63/j-55-00911-fig4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/6a5c351d58c2/j-55-00911-fig1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/aaf385724fbf/j-55-00911-fig2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/966897f2e31b/j-55-00911-fig3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/21f4b2b2dd63/j-55-00911-fig4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/6a5c351d58c2/j-55-00911-fig1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/aaf385724fbf/j-55-00911-fig2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/966897f2e31b/j-55-00911-fig3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ca16/9348878/21f4b2b2dd63/j-55-00911-fig4.jpg

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本文引用的文献

1
Self-emitted surface corrugations in dynamic fracture of silicon single crystal.硅单晶动态断裂中的自发射表面波纹
Proc Natl Acad Sci U S A. 2020 Jul 21;117(29):16872-16879. doi: 10.1073/pnas.1916805117. Epub 2020 Jul 6.
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Crack Front Interaction with Self-Emitted Acoustic Waves.裂纹前沿与自发射声波的相互作用。
Phys Rev Lett. 2018 Nov 9;121(19):195501. doi: 10.1103/PhysRevLett.121.195501.
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Ultra-high-speed indirect x-ray imaging system with versatile spatiotemporal sampling capabilities.具有通用时空采样能力的超高速间接X射线成像系统。
Appl Opt. 2018 Jun 20;57(18):5004-5010. doi: 10.1364/AO.57.005004.
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MHz frame rate hard X-ray phase-contrast imaging using synchrotron radiation.使用同步辐射的兆赫兹帧率硬X射线相衬成像
Opt Express. 2017 Jun 12;25(12):13857-13871. doi: 10.1364/OE.25.013857.
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Evaluating scintillator performance in time-resolved hard X-ray studies at synchrotron light sources.在同步辐射光源的时间分辨硬X射线研究中评估闪烁体性能。
J Synchrotron Radiat. 2016 May;23(Pt 3):685-93. doi: 10.1107/S1600577516002770. Epub 2016 Mar 24.
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Real-time direct and diffraction X-ray imaging of irregular silicon wafer breakage.实时直接和衍射 X 射线成像不规则硅片破裂。
IUCrJ. 2016 Jan 5;3(Pt 2):108-14. doi: 10.1107/S205225251502271X. eCollection 2016 Mar 1.
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On the possibilities of hard X-ray imaging with high spatio-temporal resolution using polychromatic synchrotron radiation.利用多色同步辐射实现硬 X 射线具有高时空分辨率成像的可能性。
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New dynamical equation for cracks.
Phys Rev Lett. 1991 May 13;66(19):2484-2487. doi: 10.1103/PhysRevLett.66.2484.