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无芯片无线电子皮肤由远程外延独立化合物半导体制成。

Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors.

机构信息

Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

出版信息

Science. 2022 Aug 19;377(6608):859-864. doi: 10.1126/science.abn7325. Epub 2022 Aug 18.

Abstract

Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)-based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chip-less wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave-based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

摘要

近年来,柔性和可拉伸电子产品的发展使得基于电子皮肤(e-skin)的健康监测平台得到了迅猛发展。传统的无线电子皮肤依赖于刚性集成电路芯片,这会影响整体的灵活性并消耗大量的能量。基于电感-电容谐振器的无芯片无线电子皮肤仅限于灵敏度较低的机械传感器。我们报告了一种基于独立式超薄单晶压电氮化镓膜的表面声波传感器的无芯片无线电子皮肤。基于表面声波的电子皮肤可以高度灵敏、低功耗地长期感应应变、紫外线和汗液中的离子浓度。我们展示了对脉搏的长达一周的监测。这些结果为无线健康监测设备提供了廉价且多功能的低功耗、高灵敏度平台的途径。

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