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亚吉赫兹频段片上表面声波超表面的实验实现

Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz.

作者信息

Wang Wan, Baranski Maciej, Jin Yabin, Salut Roland, Belharet Djaffar, Friedt Jean-Michel, Pan Yongdong, Xiang Yanxun, Xuan Fu-Zhen, Khelif Abdelkrim, Benchabane Sarah

机构信息

School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai, 200092, China.

CNRS, FEMTO-ST, Université de Franche-Comté, 15B avenue des Montboucons, Besançon, F-25000, France.

出版信息

Adv Sci (Weinh). 2025 Mar;12(12):e2411825. doi: 10.1002/advs.202411825. Epub 2025 Jan 31.

DOI:10.1002/advs.202411825
PMID:39887638
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11947993/
Abstract

Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.

摘要

超表面由具有不同波响应的亚波长厚度单元组成，为高效操纵弹性波和声波提供了一种创新的可能方法。由于超表面的波函数在纳米机电系统（NEMS）、传感、通信、微流体控制和量子处理中有着很高的需求，因此将超表面应用于在亚吉赫兹频率下操纵片上表面声波（SAW）仍有待进一步探索。在此，报道了片上SAW超表面的实验实现，其由位于128°Y切割铌酸锂（LiNbO）衬底上的梯度亚微米铌（Nb）矩形柱组成，工作在数百兆赫兹。所提出的SAW超表面能够通过设计按需的柱形轮廓分布来操纵透射的SAW波前函数。作为SAW超表面典型功能的宽带亚波长聚焦效应得到了实验验证。这项研究为在微米和纳米尺度上实现用于各种潜在应用的片上SAW超表面打开了一扇门。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/4e60dec0a551/ADVS-12-2411825-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/55c5427e5deb/ADVS-12-2411825-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/378815d3c738/ADVS-12-2411825-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/ec6fa6448271/ADVS-12-2411825-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/18a9ff7b74cb/ADVS-12-2411825-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/b42a46211f57/ADVS-12-2411825-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/30de5e5e5d0d/ADVS-12-2411825-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/4e60dec0a551/ADVS-12-2411825-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/55c5427e5deb/ADVS-12-2411825-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/378815d3c738/ADVS-12-2411825-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/ec6fa6448271/ADVS-12-2411825-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/18a9ff7b74cb/ADVS-12-2411825-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/b42a46211f57/ADVS-12-2411825-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/30de5e5e5d0d/ADVS-12-2411825-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d93c/11947993/4e60dec0a551/ADVS-12-2411825-g005.jpg

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