基于马赫-曾德尔干涉仪的绝缘体上硅光波导压力传感器

Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer.

作者信息

Li Chen, Zhang Chi, Yang Lijun, Guo Fangtong

机构信息

School of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi'an 710021, China.

School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

出版信息

Micromachines (Basel). 2022 Aug 15;13(8):1321. doi: 10.3390/mi13081321.

DOI:10.3390/mi13081321

PMID:36014243

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9414920/

Abstract

At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach-Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10 W/kPa and the linearity was 5.9 × 10. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field.

摘要

目前，利用微机电系统（MEMS）测量光压的方法很少。然而，由于其高精度和快速响应，本文设计了一种基于马赫-曾德尔干涉仪的脊形波导压力传感器。通过对结构各组件的设计和优化，压力传感器的灵敏度为2.2×10 W/kPa，线性度为5.9×10。该传感器性能良好且体积小，可用于光压测量领域以及其他需要测量微小压力的领域，如生物医学领域。