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含钨或铍的CrO与SiO共沉积涂层的表面、结构及力学性能增强

Surface, Structural, and Mechanical Properties Enhancement of CrO and SiO Co-Deposited Coatings with W or Be.

作者信息

Lungu Mihail, Cristea Daniel, Baiasu Flaviu, Staicu Cornel, Marin Alexandru, Pompilian Oana Gloria, Butoi Bogdan, Locovei Claudiu, Porosnicu Corneliu

机构信息

National Institute for Laser, Plasma and Radiation Physics, 077125 Magurele, Romania.

Department of Materials Science, Faculty of Materials Science and Engineering, Transilvania University, 500068 Brasov, Romania.

出版信息

Nanomaterials (Basel). 2022 Aug 20;12(16):2870. doi: 10.3390/nano12162870.

Abstract

Direct current (DC) and radio frequency (RF) magnetron sputtering methods were selected for conducting the deposition of structural materials, namely ceramic and metallic co-depositions. A total of six configurations were deposited: single thin layers of oxides (CrO, SiO) and co-deposition configurations (50:50 wt.%) as structural materials (W, Be)-(CrO, SiO), all deposited on 304L stainless steel (SS). A comprehensive evaluation such as surface topology, thermal desorption outgassing, and structural/chemical state was performed. Moreover, mechanical characterization evaluating properties such as adherence, nano indentation hardness, indentation modulus, and deformation relative to yielding, was performed. Experimental results show that, contrary to SiO matrix, the composite layers of CrO with Be and W exhibit surface smoothing with mitigation of artifacts, thus presenting a uniform and compact state with the best microstructure. These results are relevant in order to develop future dense coatings to be used in the fusion domain.

摘要

选择直流(DC)和射频(RF)磁控溅射方法来沉积结构材料,即陶瓷和金属共沉积。总共沉积了六种结构:作为结构材料的氧化物(CrO、SiO)单层以及共沉积结构(50:50重量%)(W、Be)-(CrO、SiO),所有这些都沉积在304L不锈钢(SS)上。进行了诸如表面拓扑、热脱附出气以及结构/化学状态等综合评估。此外,还进行了机械性能表征,评估诸如附着力、纳米压痕硬度、压痕模量以及相对于屈服的变形等性能。实验结果表明,与SiO基体相反,CrO与Be和W的复合层呈现出表面平滑且伪像减少的情况,从而呈现出均匀且致密的状态,具有最佳的微观结构。这些结果对于开发未来用于聚变领域的致密涂层具有重要意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8c9/9414321/80e9a114b68c/nanomaterials-12-02870-g001.jpg

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