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利用光聚合油墨进行3D柱状阵列的气溶胶喷射印刷。

Aerosol Jet Printing of 3D Pillar Arrays from Photopolymer Ink.

作者信息

Vlnieska Vitor, Gilshtein Evgeniia, Kunka Danays, Heier Jakob, Romanyuk Yaroslav E

机构信息

Empa-Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, 8600 Dübendorf, Switzerland.

Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.

出版信息

Polymers (Basel). 2022 Aug 20;14(16):3411. doi: 10.3390/polym14163411.

Abstract

An aerosol jet printing (AJP) printing head built on top of precise motion systems can provide positioning deviation down to 3 μm, printing areas as large as 20 cm × 20 cm × 30 cm, and five-axis freedom of movement. Typical uses of AJP are 2D printing on complex or flexible substrates, primarily for applications in printed electronics. Nearly all commercially available AJP inks for 2D printing are designed and optimized to reach desired electronic properties. In this work, we explore AJP for the 3D printing of free-standing pillar arrays. We utilize aryl epoxy photopolymer as ink coupled with a cross-linking "on the fly" technique. Pillar structures 550 μm in height and with a diameter of 50 μm were 3D printed. Pillar structures were characterized via scanning electron microscopy, where the morphology, number of printed layers and side effects of the AJP technique were investigated. Satellite droplets and over-spray seem to be unavoidable for structures smaller than 70 μm. Nevertheless, reactive ion etching (RIE) as a post-processing step can mitigate AJP side effects. AJP-RIE together with photopolymer-based ink can be promising for the 3D printing of microstructures, offering fast and maskless manufacturing without wet chemistry development and heat treatment post-processing.

摘要

基于精密运动系统构建的气溶胶喷射打印(AJP)打印头可实现低至3μm的定位偏差、高达20cm×20cm×30cm的打印面积以及五轴运动自由度。AJP的典型用途是在复杂或柔性基板上进行二维打印,主要用于印刷电子应用。几乎所有市售的用于二维打印的AJP油墨都经过设计和优化,以实现所需的电子性能。在这项工作中,我们探索了AJP用于独立柱阵列的三维打印。我们使用芳基环氧光聚合物作为油墨,并结合“即时”交联技术。打印出了高度为550μm、直径为50μm的柱结构。通过扫描电子显微镜对柱结构进行了表征,研究了AJP技术的形态、打印层数和副作用。对于小于70μm的结构,卫星液滴和过喷似乎是不可避免的。然而,反应离子蚀刻(RIE)作为后处理步骤可以减轻AJP的副作用。AJP-RIE与基于光聚合物的油墨一起对于微结构的三维打印可能很有前景,可提供快速且无掩膜的制造,无需湿化学显影和热处理后处理。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cb51/9412835/1da4e49c3b20/polymers-14-03411-g002.jpg

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