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气溶胶喷射打印的优化用于高分辨率、高纵横比的银线。

Optimization of aerosol jet printing for high-resolution, high-aspect ratio silver lines.

机构信息

Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455, United States.

出版信息

ACS Appl Mater Interfaces. 2013 Jun 12;5(11):4856-64. doi: 10.1021/am400606y. Epub 2013 May 22.

DOI:10.1021/am400606y
PMID:23659570
Abstract

Aerosol jet printing requires control of a number of process parameters, including the flow rate of the carrier gas that transports the aerosol mist to the substrate, the flow rate of the sheath gas that collimates the aerosol into a narrow beam, and the speed of the stage that transports the substrate beneath the beam. In this paper, the influence of process parameters on the geometry of aerosol-jet-printed silver lines is studied with the aim of creating high-resolution conductive lines of high current carrying capacity. A systematic study of process conditions revealed a key parameter: the ratio of the sheath gas flow rate to the carrier gas flow rate, defined here as the focusing ratio. Line width decreases with increasing the focusing ratio and stage speed. Simultaneously, the thickness increases with increasing the focusing ratio but decreases with increasing stage speed. Geometry control also influences the resistance per unit length and single pass printing of low-resistance silver lines is demonstrated. The results are used to develop an operability window and locate the regime for printing tall and narrow silver lines in a single pass. Under optimum conditions, lines as narrow as 20 μm with aspect ratios (thickness/width) greater than 0.1 are obtained.

摘要

气溶胶喷射打印需要控制许多工艺参数,包括输送气溶胶雾滴到基底的载气流量、使气溶胶准直成窄束的鞘气流量以及输送基底在光束下的基底台的速度。本文旨在通过创造高电流承载能力的高分辨率导电线,研究工艺参数对气溶胶喷射打印银线的几何形状的影响。对工艺条件的系统研究揭示了一个关键参数:鞘气流量与载气流量之比,在此定义为聚焦比。随着聚焦比和台速的增加,线宽减小。同时,厚度随着聚焦比的增加而增加,但随着台速的增加而减小。几何形状控制还影响单位长度的电阻,并且证明了低电阻银线的单次通过印刷。结果用于开发可操作性窗口,并定位在单次通过中打印高而窄的银线的区域。在最佳条件下,可以获得窄至 20 μm 的线,其纵横比(厚度/宽度)大于 0.1。

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