Daryani Mehdi Mollaie, Manzaneque Tomás, Wei Jia, Ghatkesar Murali Krishna
Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, The Netherlands.
Present Address: Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
Microsyst Nanoeng. 2022 Aug 30;8:92. doi: 10.1038/s41378-022-00425-8. eCollection 2022.
The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR.
纳米颗粒在各个工业领域的应用不断增加，人们对其对健康和环境影响的担忧也与日俱增。因此，纳米颗粒的表征技术至关重要。在此，我们展示一种二氧化硅微加工悬浮微通道谐振器（SMR），用于测量液体中流动的纳米颗粒的质量和浓度。我们使用激光多普勒振动测量法测量了该设备的质量检测限。当每30毫秒采样一次时，该检测限最低达到377阿秒，这相当于直径为34纳米的金纳米颗粒或直径为243纳米的聚苯乙烯颗粒。我们将测量数据的基本极限与SMR的理想无噪声测量进行了比较。最后，我们实时测量了金纳米颗粒流经SMR时的浮力质量。
