边缘取向二维导电金属有机框架薄膜的化学气相沉积
Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal-Organic Framework Thin Films.
作者信息
Choe Myeonggeun, Koo Jin Young, Park Ina, Ohtsu Hiroyoshi, Shim Ji Hoon, Choi Hee Cheul, Park Sarah S
机构信息
Department of Chemistry, Pohang University of Science and Technology (POSTECH), Pohang, 37673, Republic of Korea.
School of Science, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8550, Japan.
出版信息
J Am Chem Soc. 2022 Sep 21;144(37):16726-16731. doi: 10.1021/jacs.2c07135. Epub 2022 Sep 12.
We demonstrated the synthesis of a conductive two-dimensional metal-organic framework (MOF) thin film by single-step all-vapor-phase chemical vapor deposition (CVD). The synthesized large-area thin film of Cu(CO) has an edge-on-orientation with high crystallinity. Cu(CO) thin film-based microdevices were fabricated by e-beam lithography and had an electrical conductivity of 92.95 S/cm. Synthesis of conductive MOF thin films by the all-vapor-phase CVD will enable fundamental studies of physical properties and may help to accomplish practical applications of conductive MOFs.
我们通过单步全气相化学气相沉积（CVD）展示了一种导电二维金属有机框架（MOF）薄膜的合成。合成的大面积Cu(CO)薄膜具有高结晶度的边缘取向。基于Cu(CO)薄膜的微器件通过电子束光刻制备，其电导率为92.95 S/cm。通过全气相CVD合成导电MOF薄膜将有助于开展物理性质的基础研究，并可能有助于实现导电MOF的实际应用。
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