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射频溅射沉积二氧化钛薄膜的组成与性质

Composition and properties of RF-sputter deposited titanium dioxide thin films.

作者信息

Daughtry Jesse, Alotabi Abdulrahman S, Howard-Fabretto Liam, Andersson Gunther G

机构信息

Flinders Institute for NanoScale Science and Technology, Flinders University Adelaide SA 5001 Australia

Flinders Microscopy and Microanalysis, College of Science and Engineering, Flinders University Adelaide SA 5042 Australia.

出版信息

Nanoscale Adv. 2020 Dec 8;3(4):1077-1086. doi: 10.1039/d0na00861c. eCollection 2021 Feb 23.

DOI:10.1039/d0na00861c
PMID:36133287
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9417277/
Abstract

The photocatalytic properties of titania (TiO) have prompted research utilising its useful ability to convert solar energy into electron-hole pairs to drive novel chemistry. The aim of the present work is to examine the properties required for a synthetic method capable of producing thin TiO films, with well defined, easily modifiable characteristics. Presented here is a method of synthesis of TiO nanoparticulate thin films generated using RF plasma capable of homogenous depositions with known elemental composition and modifiable properties at a far lower cost than single-crystal TiO. Multiple depositions regimes were examined for their effect on overall chemical composition and to minimise the unwanted contaminant, carbon, from the final film. The resulting TiO films can be easily modified through heating to further induce defects and change the electronic structure, crystallinity, surface morphology and roughness of the deposited thin film.

摘要

二氧化钛(TiO₂)的光催化特性促使人们开展研究,利用其将太阳能转化为电子 - 空穴对以驱动新型化学反应的有用能力。本工作的目的是研究一种能够制备具有明确且易于改性特征的TiO₂薄膜的合成方法所需的特性。本文介绍了一种使用射频等离子体合成TiO₂纳米颗粒薄膜的方法,该方法能够进行均匀沉积,具有已知的元素组成且性能可改性,成本远低于单晶TiO₂。研究了多种沉积方式对整体化学成分的影响,并尽量减少最终薄膜中不需要的污染物碳。所得的TiO₂薄膜可以通过加热轻松改性,以进一步诱导缺陷并改变沉积薄膜的电子结构、结晶度、表面形态和粗糙度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/bc84285cb5ea/d0na00861c-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/b375e5ee43f4/d0na00861c-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/8a30cee447eb/d0na00861c-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/f16763bd1124/d0na00861c-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/833892f83e3f/d0na00861c-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/bc84285cb5ea/d0na00861c-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/b375e5ee43f4/d0na00861c-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/8a30cee447eb/d0na00861c-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/f16763bd1124/d0na00861c-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/833892f83e3f/d0na00861c-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bca/9417277/bc84285cb5ea/d0na00861c-f5.jpg

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