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原位宽频表面增强红外吸收光谱法能够解析镀铜添加剂的界面结构。

In Situ Wide-Frequency Surface-Enhanced Infrared Absorption Spectroscopy Enables One to Decipher the Interfacial Structure of a Cu Plating Additive.

作者信息

Mao Zijie, Wu Yicai, Ma Xian-Yin, Zheng Li, Zhang Xia-Guang, Cai Wen-Bin

机构信息

Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Collaborative Innovation Center of Chemistry for Energy Materials, Department of Chemistry, Fudan University, Shanghai 200438, China.

Huawei Technologies Co., Ltd., Shenzhen 518129, China.

出版信息

J Phys Chem Lett. 2022 Oct 6;13(39):9079-9084. doi: 10.1021/acs.jpclett.2c02541. Epub 2022 Sep 26.

Abstract

In situ spectroscopic characterization of the interfacial structure of an organic additive at a Cu electrode is essential for a mechanistic understanding of Cu superfilling at the molecular level. In this work, we demonstrate wide-frequency attenuated total reflection surface-enhanced infrared absorption spectroscopy (wf-ATR-SEIRAS) to elucidate the dissociative adsorption of bis(sodium sulfopropyl)-disulfide (a typical accelerator) on a Cu electrode in conjunction with the electrochemical quartz crystal microbalance measurement and modeling calculations. The wf-ATR-SEIRAS clearly identifies the peaks featuring the sulfonate and methylene groups as well as the C-S and C-S vibrations of the adsorbate. Analysis of relative peak intensities from 1100 to 650 cm reveals a more tilted alkyl chain axis for the thiolate on Cu than that on Au, which is supported by comparative density functional theory calculations. This work opens a new avenue for the wf-ATR-SEIRAS to study interfacial structures of electroplating additives related to advanced microelectronics manufacture.

摘要

在铜电极上对有机添加剂的界面结构进行原位光谱表征对于从分子水平上对铜超填充进行机理理解至关重要。在这项工作中,我们展示了宽频衰减全反射表面增强红外吸收光谱法(wf-ATR-SEIRAS),结合电化学石英晶体微天平测量和模型计算,以阐明双(磺丙基)二硫化物(一种典型的促进剂)在铜电极上的解离吸附。wf-ATR-SEIRAS清楚地识别出了以磺酸盐和亚甲基基团以及吸附质的C-S和C-S振动为特征的峰。对1100至650厘米处相对峰强度的分析表明,铜上硫醇盐的烷基链轴比金上的更倾斜,这得到了比较密度泛函理论计算的支持。这项工作为wf-ATR-SEIRAS研究与先进微电子制造相关的电镀添加剂的界面结构开辟了一条新途径。

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