Babatain Wedyan, Buttner Ulrich, El-Atab Nazek, Hussain Muhammad Mustafa
Electrical and Computer Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal23955-6900, Saudi Arabia.
Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana47907, United States.
ACS Nano. 2022 Dec 27;16(12):20305-20317. doi: 10.1021/acsnano.2c06180. Epub 2022 Oct 6.
Motion sensors are an essential component of many electronic systems. However, the development of inertial motion sensors based on fatigue-free soft proof mass has not been explored extensively in the field of soft electronics. Nontoxic gallium-based liquid metals are an emerging class of material that exhibit attractive electromechanical properties, making them excellent proof mass materials for inertial sensors. Here, we propose and demonstrate a fully soft laser-induced graphene (LIG) and liquid metal-based inertial sensor integrated with temperature, humidity, and breathing sensors. The inertial sensor design confines a graphene-coated liquid metal droplet inside a fluidic channel, rolling over LIG resistive electrode. The proposed sensor architecture and material realize a highly mobile proof mass and a vibrational space for its oscillation. The inertial sensor exhibits a high sensitivity of 6.52% m s and excellent repeatability (over 12 500 cycles). The platform is fabricated using a scalable, rapid laser writing technique and integrated with a programmable system on a chip (PSoC) to function as a stand-alone system for real-time wireless monitoring of movement patterns and the control of a robotic arm. The developed printed inertial platform is an excellent candidate for the next-generation of wearables motion tracking platforms and soft human-machine interfaces.
运动传感器是许多电子系统的重要组成部分。然而，基于无疲劳软质质量块的惯性运动传感器的开发在软电子领域尚未得到广泛探索。无毒的镓基液态金属是一类新兴材料，具有吸引人的机电特性，使其成为惯性传感器的优良质量块材料。在此，我们提出并展示了一种完全柔软的、集成了温度、湿度和呼吸传感器的激光诱导石墨烯（LIG）与液态金属基惯性传感器。该惯性传感器的设计将一个涂有石墨烯的液态金属微滴限制在一个流体通道内，使其在LIG电阻电极上滚动。所提出的传感器架构和材料实现了一个高度可移动的质量块及其振荡的振动空间。该惯性传感器具有6.52% m s的高灵敏度和出色的重复性（超过12500个循环）。该平台采用可扩展的快速激光写入技术制造，并与片上可编程系统（PSoC）集成，用作独立系统，用于实时无线监测运动模式和控制机器人手臂。所开发的印刷惯性平台是下一代可穿戴运动跟踪平台和柔软人机界面的优秀候选者。
