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具有嵌入式铜纳米粒子的 TCO 薄膜的等离子体和导电结构。

Plasmonic and Conductive Structures of TCO Films with Embedded Cu Nanoparticles.

机构信息

Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, Via S. Sofia 64, 95123 Catania, Italy.

CNR-IMM, Via S. Sofia 64, 95123 Catania, Italy.

出版信息

Int J Mol Sci. 2022 Oct 6;23(19):11886. doi: 10.3390/ijms231911886.

Abstract

Cu nanoparticles were produced by using solid-state dewetting (dry) of a 1.3 nm Cu layer or laser ablation of a Cu solid target (wet) in acetone and methanol. The morphology and chemical composition of the nanoparticles were investigated as a function of the synthesis methods and their key parameters of the annealing temperature (200-500 °C) and the liquid environment during the ablation. Cu nanoparticles were then embedded in transparent conductive oxide (TCO) films as aluminum-doped zinc oxide (AZO) or zirconium-doped indium oxide (IZrO); the TCO/Cu nanoparticle/TCO structures were synthesized with all combinations of AZO and IZrO as the top and bottom layers. The goal was to achieve a plasmonic and conductive structure for photovoltaic applications via a comparison of the involved methods and all fabricated structures. In particular, solid-state dewetting produced faceted or spherical (depending on the annealing temperature) nanoparticles with an average size below 150 nm while laser ablation produced spherical nanoparticles below 250 nm. Dry and wet plasmonic conductive structures as a function of the TCOs employed and the temperature of annealing could reach a sheet resistance of 86 Ω/sq. The energy band-gap E, absorbance, transmittance, and reflectance of the plasmonic conductive structures were investigated in the UV-vis-NIR range. They showed a dependence on the sequence of the top and bottom TCO, with best transmittances of 89.4% for the dry plasmonic conductive structure and 84.7% for the wet plasmonic conductive structure. The latter showed a higher diffused transmittance of between 10-20% in the visible range.

摘要

采用固态去湿(干法)或激光烧蚀(湿法)在丙酮和甲醇中处理 1.3nm 的铜层或铜固体靶材,制备了 Cu 纳米颗粒。研究了纳米颗粒的形态和化学组成,作为合成方法和退火温度(200-500°C)及烧蚀过程中液体环境等关键参数的函数。将 Cu 纳米颗粒嵌入透明导电氧化物(TCO)薄膜中,如掺铝氧化锌(AZO)或掺锆氧化铟(IZrO);通过 AZO 和 IZrO 作为顶层和底层的所有组合,合成了 TCO/Cu 纳米颗粒/TCO 结构。目的是通过比较所涉及的方法和所有制备的结构,为光伏应用获得等离子体和导电结构。具体来说,固态去湿产生了具有面心或球形(取决于退火温度)的纳米颗粒,平均粒径低于 150nm,而激光烧蚀则产生了粒径低于 250nm 的球形纳米颗粒。作为 TCO 和退火温度函数的干法和湿法等离子体导电结构的方阻可达到 86 Ω/sq。研究了等离子体导电结构在 UV-vis-NIR 范围内的能带隙 E、吸收、透射率和反射率。结果表明,它们与顶部和底部 TCO 的顺序有关,在干法等离子体导电结构中,最佳透射率为 89.4%,在湿法等离子体导电结构中,最佳透射率为 84.7%。后者在可见光范围内的漫透射率较高,在 10-20%之间。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a2a7/9569451/008a17add981/ijms-23-11886-g001.jpg

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