Chumak Maksim A, Filatov Leonid A, Ezhov Ilya S, Kolosko Anatoly G, Filippov Sergey V, Popov Eugeni O, Maximov Maxim Yu
Institute of Metallurgy of Mechanical Engineering and Transport, Peter the Great Saint-Petersburg Polytechnic University, st. Politekhnicheskaya, 29, 195251 St. Petersburg, Russia.
Cyclotron Laboratory, Ioffe Institute, st. Politekhnicheskaya, 26, 194021 St. Petersburg, Russia.
Nanomaterials (Basel). 2022 Oct 4;12(19):3463. doi: 10.3390/nano12193463.
The paper presents a study of a large-area field emitter based on a composite of vertically aligned carbon nanotubes covered with a continuous and conformal layer of nickel oxide by the atomic layer deposition method. The arrays of carbon nanotubes were grown by direct current plasma-enhanced chemical vapor deposition on a pure Si substrate using a nickel oxide catalyst which was also deposited by atomic layer deposition. The emission characteristics of an array of pure vertically oriented carbon nanotubes with a structure identical in morphology, covered with a layer of thin nickel oxide, are compared using the data from a unique computerized field emission projector. The deposition of an oxide coating favorably affected the emission current fluctuations, reducing them from 40% to 15% for a pristine carbon nanotube and carbon nanotube/nickel oxide, respectively. However, the 7.5 nm nickel oxide layer coating leads to an increase in the turn-on field from 6.2 to 9.7 V/µm.
本文介绍了一项基于垂直排列的碳纳米管复合材料的大面积场发射体研究，该复合材料通过原子层沉积法覆盖有连续且保形的氧化镍层。碳纳米管阵列通过直流等离子体增强化学气相沉积法在纯硅衬底上生长，使用的氧化镍催化剂也通过原子层沉积法沉积。利用独特的计算机化场发射投影仪的数据，比较了形态结构相同、覆盖有一层薄氧化镍的纯垂直取向碳纳米管阵列的发射特性。氧化物涂层的沉积对发射电流波动产生了有利影响，使原始碳纳米管和碳纳米管/氧化镍的发射电流波动分别从40%降至15%。然而，7.5纳米的氧化镍层涂层导致开启场从6.2 V/µm增加到9.7 V/µm。
