Li Kebin, Hernández-Castro Javier Alejandro, Morton Keith, Veres Teodor
National Research Council of Canada, 75, de Mortagne, Boucherville, QC J4B 6Y4, Canada.
Currently is working with Symgery, 224 Rue de l'Hôpital, Montréal, QC H2Y 1V8, Canada.
Polymers (Basel). 2022 Oct 9;14(19):4228. doi: 10.3390/polym14194228.
Freestanding, flexible and open through-hole polymeric micro- and nanostructured membranes were successfully fabricated over large areas (>16 cm2) via solvent removal of sacrificial scaffolds filled with polymer resin by spontaneous capillary flow. Most of the polymeric membranes were obtained through a rapid UV curing processes via cationic or free radical UV polymerisation. Free standing microstructured membranes were fabricated across a range of curable polymer materials, including: EBECRYL3708 (radical UV polymerisation), CUVR1534 (cationic UV polymerisation) UV lacquer, fluorinated perfluoropolyether urethane methacrylate UV resin (MD700), optical adhesive UV resin with high refractive index (NOA84) and medical adhesive UV resin (1161-M). The present method was also extended to make a thermal set polydimethylsiloxane (PDMS) membranes. The pore sizes for the as-fabricated membranes ranged from 100 µm down to 200 nm and membrane thickness could be varied from 100 µm down to 10 µm. Aspect ratios as high as 16.7 were achieved for the 100 µm thick membranes for pore diameters of approximately 6 µm. Wide-area and uniform, open through-hole 30 µm thick membranes with 15 µm pore size were fabricated over 44 × 44 mm2 areas. As an application example, arrays of Au nanodots and Pd nanodots, as small as 130 nm, were deposited on Si substrates using a nanoaperture polymer through-hole membrane as a stencil.
通过自发毛细管流动去除填充有聚合物树脂的牺牲支架中的溶剂，成功地在大面积（>16平方厘米）上制备了独立、灵活且开放的通孔聚合物微结构和纳米结构膜。大多数聚合物膜是通过阳离子或自由基紫外光聚合的快速紫外光固化过程获得的。独立的微结构膜是通过一系列可固化的聚合物材料制备的，包括：EBECRYL3708（自由基紫外光聚合）、CUVR1534（阳离子紫外光聚合）紫外漆、氟化全氟聚醚聚氨酯甲基丙烯酸酯紫外树脂（MD700）、高折射率光学粘合剂紫外树脂（NOA84）和医用粘合剂紫外树脂（1161-M）。本方法还扩展到制备热固性聚二甲基硅氧烷（PDMS）膜。所制备膜的孔径范围从100微米到200纳米，膜厚度可从100微米变化到10微米。对于孔径约为6微米的100微米厚的膜，纵横比高达16.7。在44×44平方毫米的区域上制备了孔径为15微米、厚度为30微米的大面积、均匀、开放的通孔膜。作为一个应用实例，使用纳米孔径聚合物通孔膜作为模板，在硅基板上沉积了尺寸小至130纳米的金纳米点和钯纳米点阵列。
