Zhang Pengfei, Li Linguang, Yang Zhe, Pan Bo, Zhang Meng, Guo Xiaoguang, Li Gang, Kim Daewook, Guo Jiang
Opt Express. 2022 Jul 18;30(15):28190-28206. doi: 10.1364/OE.465975.
The surface quality of optical lenses is highly required in imaging functions. Normally, ultra-precision turning is employed to fabricate the optical lenses. However, ultra-precision turning cannot meet the surface quality demands due to the tool marks. In this study, a new damping-clothed (DC) tool and chemical enhanced non-Newtonian ultrafine (CNNU) slurry for non-contact polishing are proposed to achieve sub-nanometer roughness on aspherical optical molds. A material removal model based on the hydrodynamic pressure and velocity simulation was established to calculate the dwell time in curved surface machining. The formation mechanism of sub-nanometer roughness is clarified. The proposed method and slurry were verified by the experiments in processing NiP alloy aspheric optical mold. After the process, surface roughness Sa achieved 0.54 nm and the form accuracy is less than PV 600 nm.
光学透镜的表面质量在成像功能方面有很高要求。通常，采用超精密车削来制造光学透镜。然而，由于刀具痕迹，超精密车削无法满足表面质量要求。在本研究中，提出了一种用于非接触抛光的新型阻尼布（DC）刀具和化学增强非牛顿超细（CNNU）磨料浆，以在非球面光学模具上实现亚纳米粗糙度。建立了基于流体动力压力和速度模拟的材料去除模型，以计算曲面加工中的驻留时间。阐明了亚纳米粗糙度的形成机理。通过加工NiP合金非球面光学模具的实验验证了所提出的方法和磨料浆。加工后，表面粗糙度Sa达到0.54 nm，形状精度小于PV 600 nm。
