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基于磁流变抛光的镍磷涂层纳米精密加工

Nano-Precision Processing of NiP Coating by Magnetorheological Finishing.

作者信息

Xu Chao, Peng Xiaoqiang, Hu Hao, Liu Junfeng, Li Huang, Luo Tiancong, Lai Tao

机构信息

Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.

Beijing Zhenxing Institute of Metrology and Measurement, Beijing 100074, China.

出版信息

Nanomaterials (Basel). 2023 Jul 20;13(14):2118. doi: 10.3390/nano13142118.

Abstract

NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.

摘要

化学镀镍磷涂层具有优异的物理化学性能,是光学元件镀膜的最佳材料之一。在光学元件上加工化学镀镍磷涂层时,通常采用单点金刚石车削(SPDT)作为第一道工序。然而,SPDT车削会在工件上产生周期性车削纹路,影响元件的光学性能。磁流变抛光(MRF)是一种基于计算机控制光学表面成形的确定性子孔径抛光工艺,能够校正表面形状误差,提高工件表面质量。本文分析了化学镀镍磷涂层的特性,研制了一种专门用于化学镀镍磷涂层加工的磁流变液。基于基本的普雷斯顿原理,建立了化学镀镍磷涂层MRF抛光的材料去除模型,并通过正交试验对MRF制造工艺进行了优化。优化后的MRF抛光工艺能够快速去除化学镀镍磷涂层表面的SPDT车削纹路,并校正表面轮廓误差。同时,化学镀镍磷涂层的表面质量也得到了提高,表面粗糙度从SPDT车削后的Ra 2.054 nm降至Ra 0.705 nm。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cdb/10385832/af877c5e5d4e/nanomaterials-13-02118-g001.jpg

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