Fu Qiuxue, Sun Yurun, Yu Shuzhen, Wang Ancheng, Yin Jiajing, Dong Jian-Rong
Appl Opt. 2022 Oct 1;61(28):8389-8394. doi: 10.1364/AO.472435.
795 nm vertical-cavity surface-emitting lasers (VCSELs) with in-phase surface gratings are fabricated and investigated theoretically and experimentally. The polarization characteristics of 795 nm VCSELs with various grating periods and depths are analyzed using the rigorous coupled-wave analysis (RCWA) method; the dependence of polarization stability on the profile of gratings demonstrates that the trapezoid grating ridge slightly enhances the orthogonal polarization suppression ratio (OPSR), but increases the threshold current. The fabricated VCSELs with a sub-wavelength in-phase surface grating of a duty cycle of 0.5 show stabilized output polarization at the cost of increasing the threshold current which is in agreement with the calculations. The grating VCSELs with a period of 200 nm and an oxide aperture of 3.43µ×4.39µ produce a single-mode output with an OPSR of 16.6 dB and a slope efficiency of 0.42 W/A at 85°C.
制备了具有同相表面光栅的795nm垂直腔面发射激光器（VCSEL），并进行了理论和实验研究。采用严格耦合波分析（RCWA）方法分析了不同光栅周期和深度的795nm VCSEL的偏振特性；偏振稳定性对光栅轮廓的依赖性表明，梯形光栅脊稍提高了正交偏振抑制比（OPSR），但增加了阈值电流。制备的占空比为0.5的亚波长同相表面光栅VCSEL以增加阈值电流为代价实现了稳定的输出偏振，这与计算结果一致。周期为200nm、氧化孔径为3.43µ×4.39µ的光栅VCSEL在85°C时产生单模输出，OPSR为16.6dB，斜率效率为0.42W/A。
