Fu Qiuxue, Sun Yurun, Yu Suzhen, Wang Ancheng, Yin Jiajing, Zhao Yongming, Dong Jianrong
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
Key Laboratory of Nano Devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China.
Nanomaterials (Basel). 2023 Mar 21;13(6):1120. doi: 10.3390/nano13061120.
Low threshold current and polarization-stabilized 795 nm vertical-cavity surface-emitting lasers (VCSELs) are fabricated by integrating a surface grating of high polarization selectivity and high reflectivity. The rigorous coupled-wave analysis method is used to design the surface grating. For the devices with a grating period of 500 nm, a grating depth of ~150 nm, and a diameter of the surface grating region of 5 μm, a threshold current of 0.4 mA and an orthogonal polarization suppression ratio (OPSR) of 19.56 dB are obtained. The emission wavelength of 795 nm of a single transverse mode VCSEL is achieved at a temperature of 85 °C under an injection current of 0.9 mA. In addition, experiments demonstrate that the threshold and output power also depended on the size of the grating region.
通过集成具有高偏振选择性和高反射率的表面光栅,制备出了低阈值电流和偏振稳定的795nm垂直腔面发射激光器(VCSEL)。采用严格耦合波分析方法设计表面光栅。对于光栅周期为500nm、光栅深度约为150nm、表面光栅区域直径为5μm的器件,获得了0.4mA的阈值电流和19.56dB的正交偏振抑制比(OPSR)。在85℃温度下,注入电流为0.9mA时,实现了单横模VCSEL的795nm发射波长。此外,实验表明阈值和输出功率也取决于光栅区域的尺寸。