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低阈值电流和偏振稳定的795纳米垂直腔面发射激光器

Low Threshold Current and Polarization-Stabilized 795 nm Vertical-Cavity Surface-Emitting Lasers.

作者信息

Fu Qiuxue, Sun Yurun, Yu Suzhen, Wang Ancheng, Yin Jiajing, Zhao Yongming, Dong Jianrong

机构信息

School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.

Key Laboratory of Nano Devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China.

出版信息

Nanomaterials (Basel). 2023 Mar 21;13(6):1120. doi: 10.3390/nano13061120.

DOI:10.3390/nano13061120
PMID:36986014
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10058018/
Abstract

Low threshold current and polarization-stabilized 795 nm vertical-cavity surface-emitting lasers (VCSELs) are fabricated by integrating a surface grating of high polarization selectivity and high reflectivity. The rigorous coupled-wave analysis method is used to design the surface grating. For the devices with a grating period of 500 nm, a grating depth of ~150 nm, and a diameter of the surface grating region of 5 μm, a threshold current of 0.4 mA and an orthogonal polarization suppression ratio (OPSR) of 19.56 dB are obtained. The emission wavelength of 795 nm of a single transverse mode VCSEL is achieved at a temperature of 85 °C under an injection current of 0.9 mA. In addition, experiments demonstrate that the threshold and output power also depended on the size of the grating region.

摘要

通过集成具有高偏振选择性和高反射率的表面光栅，制备出了低阈值电流和偏振稳定的795nm垂直腔面发射激光器（VCSEL）。采用严格耦合波分析方法设计表面光栅。对于光栅周期为500nm、光栅深度约为150nm、表面光栅区域直径为5μm的器件，获得了0.4mA的阈值电流和19.56dB的正交偏振抑制比（OPSR）。在85℃温度下，注入电流为0.9mA时，实现了单横模VCSEL的795nm发射波长。此外，实验表明阈值和输出功率也取决于光栅区域的尺寸。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/c7d66835d78a/nanomaterials-13-01120-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/1d060035c599/nanomaterials-13-01120-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/65dfc73f4fb7/nanomaterials-13-01120-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/1ee86d54fdcf/nanomaterials-13-01120-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/34c8e0536fe0/nanomaterials-13-01120-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/d3a400e079bb/nanomaterials-13-01120-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/a3a8ab871c5b/nanomaterials-13-01120-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/3dabbf155c41/nanomaterials-13-01120-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/c7d66835d78a/nanomaterials-13-01120-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/1d060035c599/nanomaterials-13-01120-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/65dfc73f4fb7/nanomaterials-13-01120-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/1ee86d54fdcf/nanomaterials-13-01120-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/34c8e0536fe0/nanomaterials-13-01120-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/d3a400e079bb/nanomaterials-13-01120-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/a3a8ab871c5b/nanomaterials-13-01120-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/3dabbf155c41/nanomaterials-13-01120-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/212a/10058018/c7d66835d78a/nanomaterials-13-01120-g008.jpg

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本文引用的文献

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Polarization control of 795  nm vertical-cavity surface-emitting lasers by in-phase surface gratings.通过同相表面光栅实现795纳米垂直腔面发射激光器的偏振控制。
Appl Opt. 2022 Oct 1;61(28):8389-8394. doi: 10.1364/AO.472435.
2
An LSPR Sensor Integrated with VCSEL and Microfluidic Chip.一种集成了垂直腔面发射激光器（VCSEL）和微流控芯片的局域表面等离子体共振（LSPR）传感器。
Nanomaterials (Basel). 2022 Jul 29;12(15):2607. doi: 10.3390/nano12152607.
3
Large-aperture single-mode 795 nm VCSEL for chip-scale nuclear magnetic resonance gyroscope with an output power of 4.1 mW at 80 °C.
用于芯片级核磁共振陀螺仪的大孔径单模795纳米垂直腔面发射激光器，在80°C时输出功率为4.1毫瓦。
Opt Express. 2022 Mar 14;30(6):8991-8999. doi: 10.1364/OE.450118.
4
Control of polarization switching in a VCSEL via resonant feedback from a whispering-gallery-mode cavity.通过回音壁模式腔的共振反馈来控制垂直腔面发射激光器中的偏振切换。
Opt Lett. 2022 Feb 15;47(4):862-865. doi: 10.1364/OL.450124.
5
High-power and single-mode VCSEL arrays with single-polarized outputs by using package-induced tensile strain.通过利用封装引起的拉伸应变实现具有单偏振输出的高功率和单模垂直腔面发射激光器阵列。
Opt Lett. 2020 Sep 1;45(17):4839-4842. doi: 10.1364/OL.398896.
6
OPSR enhancement of high-temperature operating shallow-surface grating VCSELs.高温工作浅表面光栅垂直腔面发射激光器的光泵浦自旋反转增强
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