Cheng Hao, Wang Ying, Wei Kai, Liu Zhihua, Yang Ming, Cai Chenguang
Appl Opt. 2022 Sep 10;61(26):7662-7670. doi: 10.1364/AO.467990.
Angular vibration calibration is required to determine the sensitivity of sensors such as dynamic inclinometers, gyroscopes, and angular accelerometers, which are used for angular motion measurement in engineering applications. Additionally, the calibration performance depends on the accuracy of the angle measurement by laser interferometry or a circular grating (CG) method that is commonly used in vibration calibration. However, these methods usually own a complex and high-cost system or limited frequency and amplitude ranges. In this study, a novel, to the best of our knowledge, angle measurement method that combines a special visual encoder and an accurate angular position detection method is investigated; the method requires only a simple and flexible telecentric vision measurement system. Comparison experiments with the CG method demonstrate that the investigated method has the maximum measurement deviation of 0.0014° and 0.0138° for static angle measurement in the small-angle range and continuous full circle, respectively. The relative deviation of the angular vibration measurement in the range of 0.1-8 Hz with amplitudes 0-100° is less than 0.173%. Additionally, the relative deviation of calibrated sensitivity of a gyroscope by the investigated and CG methods is less than 0.096%.
角振动校准对于确定诸如动态倾角仪、陀螺仪和角加速度计等传感器的灵敏度是必要的，这些传感器用于工程应用中的角运动测量。此外，校准性能取决于激光干涉测量法或振动校准中常用的圆形光栅（CG）法进行角度测量的精度。然而，这些方法通常拥有复杂且成本高昂的系统，或者频率和幅度范围有限。在本研究中，据我们所知，研究了一种结合特殊视觉编码器和精确角位置检测方法的新型角度测量方法；该方法仅需要一个简单且灵活的远心视觉测量系统。与CG法的对比实验表明，所研究的方法在小角度范围和连续全圆静态角度测量中，最大测量偏差分别为0.0014°和0.0138°。在0.1 - 8 Hz频率范围、0 - 100°幅度下，角振动测量的相对偏差小于0.173%。此外，所研究方法和CG法校准陀螺仪灵敏度的相对偏差小于0.096%。
