Mathiyazhagan Rajendran, SampathKumar SenthamaraiKannan, Karthikeyan Palanisamy
Department of Production Technology, Madras Institute of Technology Campus, Anna University, Chennai 600044, Tamil Nadu, India.
Department of Mechanical Engineering, College of Engineering Campus, Anna University, Chennai 600025, Tamil Nadu, India.
Micromachines (Basel). 2022 Oct 15;13(10):1746. doi: 10.3390/mi13101746.
The profile generation is highly complex for roughness measurement using a capacitive sensor because of the small peak-to-peak width of the machined surface and the close proximity of the sensor setting with the machining setup which has the chance of damaging the sensor. Considering these shortcomings, a higher sensor sensing diameter with an appropriate resolution has been selected for a single-shot approach. An automated micro gantry XYZ system is integrated with a capacitive sensor to precisely target, move, and measure the roughness. For investigation, a vertical milled surface with a wide roughness range has been prepared. A Stylus profilometer has been used to measure the roughness () of the specimens for comparison. An experiment has been conducted on the above system with a 5.6 mm capacitance sensor, and an estimation model using regression has been obtained using sensor data to estimate . In conclusion, the single-shot approach with a 5.6 mm sensing diameter sensor, the proposed micro gantry system, and the estimation model performs better in instantaneous noncontact measurement in the range of 0.3 µm to 2.9 µm roughness estimation. The influence of tilt and waviness has also been discussed using FEA analysis.
由于加工表面的峰峰值宽度较小,且传感器设置与加工装置距离较近,有可能损坏传感器,因此使用电容式传感器进行粗糙度测量时,轮廓生成非常复杂。考虑到这些缺点,已选择具有适当分辨率的较大传感器传感直径用于单次测量方法。一个自动化的微型龙门式XYZ系统与一个电容式传感器集成在一起,以精确地定位、移动和测量粗糙度。为了进行研究,制备了一个具有较宽粗糙度范围的垂直铣削表面。已使用触针轮廓仪测量试样的粗糙度()以进行比较。已在上述系统上使用5.6毫米电容式传感器进行了实验,并使用传感器数据获得了一个使用回归的估计模型来估计。总之,采用5.6毫米传感直径传感器的单次测量方法、所提出的微型龙门系统以及估计模型在粗糙度估计范围为0.3微米至2.9微米的瞬时非接触测量中表现更好。还使用有限元分析讨论了倾斜和波纹的影响。