Wang Hailan, Yang Chenying, Wang Yusi, Yuan Wenjia, Zheng Tingting, Chen Xiao, Liu Yujie, Zhang Yueguang, Shen Weidong
Opt Express. 2022 Aug 1;30(16):28922-28931. doi: 10.1364/OE.464327.
Wide-angle and broadband antireflection (AR) coating is of the essence in modern optical systems in many fields, which has a great influence on the stray light and imaging quality. A simple and convenient manufacturing method is proposed to address this issue based on a composite coating combining the nano-tapered AlO•xHO (AH) structure and high-low index thin film stack. The optical properties of nano-tapered AH structure at various thickness are first studied and modeled in optics by several homogeneous sub-layers with the graded equivalent index. The designed composite AR coatings are manufactured by vacuum deposition and wet etching subsequently in the hot deionized water. Compared to the common dielectric multilayer antireflection stack, the composite coating presents excellent AR performance. The measured average reflectance values of the double-side coated BK7 glass are as low as 0.40%, 0.41%, 0.56% and 3.13% in 400-1100nm band at angles of incidence (AOI) of 6°, 20°, 40°, and 60°, respectively, while the measured average transmittance at normal incidence increases up to 99.3%. Finally, the process reproductivity, environmental reliability test including long term storage, high temperature annealing and 85°C-85% relative humidity storage of the composite coatings are evaluated. The proposed AR scheme provides a low-cost, efficient, wide-angle and broadband AR coating for kinds of large-curvature components and complex surfaces in fields of consumer electronics, automotive, security, etc.
广角宽带减反射(AR)涂层在许多领域的现代光学系统中至关重要,它对杂散光和成像质量有很大影响。基于纳米锥形AlO•xHO(AH)结构与高低折射率薄膜堆栈相结合的复合涂层,提出了一种简单便捷的制造方法来解决这一问题。首先研究了不同厚度纳米锥形AH结构的光学特性,并通过几个具有渐变等效折射率的均匀子层在光学中进行建模。设计的复合AR涂层通过真空沉积和随后在热去离子水中的湿蚀刻来制造。与普通介质多层减反射堆栈相比,复合涂层具有优异的AR性能。双面涂覆的BK7玻璃在400 - 1100nm波段,入射角(AOI)为6°、20°、40°和60°时,测量得到的平均反射率值分别低至0.40%、0.41%、0.56%和3.13%,而在正入射时测量得到的平均透过率提高到99.3%。最后,评估了复合涂层的工艺重现性以及包括长期存储、高温退火和85°C - 85%相对湿度存储在内的环境可靠性测试。所提出的AR方案为消费电子、汽车、安防等领域的各种大曲率部件和复杂表面提供了一种低成本、高效、广角宽带的AR涂层。