Bert Nikolay, Ushanov Vitaliy, Snigirev Leonid, Kirilenko Demid, Ulin Vladimir, Yagovkina Maria, Preobrazhenskii Valeriy, Putyato Mikhail, Semyagin Boris, Kasatkin Igor, Chaldyshev Vladimir
Ioffe Institute, 26 Politekhnicheskaya Str., 194021 Saint Petersburg, Russia.
Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the RAS, 13 Lavrentyev Prospekt, 630090 Novosibirsk, Russia.
Materials (Basel). 2022 Oct 28;15(21):7597. doi: 10.3390/ma15217597.
AlGaAsSb and AlGaAs films as thick as 1 μm with Al content as high as 60% were successfully grown by low-temperature (200 °C) MBE. To overcome the well-known problem of growth disruption due to a high aluminum content and a low growth temperature, we applied intermittent growth with the temperature elevation to smooth out the emerging roughness of the growth front. Post-growth annealing of the obtained material allowed us to form a developed system of As or AsSb nanoinclusions, which occupy 0.3-0.6% of the material volume. While the As nanoinclusions are optically inactive, the AsSb nanoinclusions provide a strong optical absorption near the band edge of the semiconductor matrix due to the Fröhlich plasmon resonance. Owing to the wider bandgap of the grown AlGaAsSb compound, we have expanded the spectral range available for studying the Fröhlich plasmon resonance. The grown metamaterial represents an optically active medium of which the formation process is completely compatible with the epitaxial growth technology of semiconductors.
通过低温(200°C)分子束外延(MBE)成功生长出了厚度达1μm且铝含量高达60%的AlGaAsSb和AlGaAs薄膜。为克服因高铝含量和低生长温度导致的生长中断这一众所周知的问题,我们采用了升温间歇生长法来消除生长前沿出现的粗糙度。对所得材料进行生长后退火处理,使我们能够形成一个发达的砷(As)或砷化锑(AsSb)纳米夹杂体系,这些纳米夹杂占据材料体积的0.3 - 0.6%。虽然砷纳米夹杂没有光学活性,但由于弗罗利希等离子体共振,砷化锑纳米夹杂在半导体基体的带边附近提供了强烈的光吸收。由于所生长的AlGaAsSb化合物具有更宽的带隙,我们扩大了可用于研究弗罗利希等离子体共振的光谱范围。所生长的超材料代表一种光学活性介质,其形成过程与半导体的外延生长技术完全兼容。