Streletskiy Oleg, Zavidovskiy Ilya, Yakubovsky Dmitry, Doroshina Natalia, Syuy Alexander, Lebedinskij Yury, Markeev Andrey, Arsenin Aleksey, Volkov Valentyn, Novikov Sergey
Department of Physics, M.V. Lomonosov Moscow State University, Leninskie Gory 1, 119991 Moscow, Russia.
Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, 141700 Dolgoprudny, Russia.
Materials (Basel). 2022 Nov 2;15(21):7721. doi: 10.3390/ma15217721.
The possibility of controlled scalable nanostructuring of surfaces by the formation of the plasmonic nanoparticles is very important for the development of sensors, solar cells, etc. In this work, the formation of the ensembles of silver nanoparticles on silicon and glass substrates by the magnetron deposition technique and the subsequent low-energy Ar ion irradiation was studied. The possibility of controlling the sizes, shapes and aerial density of the nanoparticles by the variation of the deposition and irradiation parameters was systematically investigated. Scanning electron microscopy studies of the samples deposited and irradiated in different conditions allowed for analysis of the morphological features of the nanoparticles and the distribution of their sizes and allowed for determination of the optimal parameters for the formation of the plasmonic-active structures. Additionally, the plasmonic properties of the resulting nanoparticles were characterized by means of linear spectroscopy and surface-enhanced Raman spectroscopy. Hereby, in this work, we demonstrate the possibility of the fabrication of silver nanoparticles with a widely varied range of average sizes and aerial density by means of a post-deposition ion irradiation technique to form nanostructured surfaces which can be applied in sensing technologies and surface-enhanced Raman spectroscopy (SERS).
通过形成等离子体纳米颗粒来实现表面的可控可扩展纳米结构化，对于传感器、太阳能电池等的发展非常重要。在这项工作中，研究了通过磁控溅射沉积技术在硅和玻璃基板上形成银纳米颗粒集合体以及随后的低能氩离子辐照。系统地研究了通过改变沉积和辐照参数来控制纳米颗粒的尺寸、形状和面密度的可能性。对在不同条件下沉积和辐照的样品进行扫描电子显微镜研究，可以分析纳米颗粒的形态特征及其尺寸分布，并确定形成等离子体活性结构的最佳参数。此外，通过线性光谱和表面增强拉曼光谱对所得纳米颗粒的等离子体特性进行了表征。因此，在这项工作中，我们展示了通过沉积后离子辐照技术制造具有广泛平均尺寸和面密度范围的银纳米颗粒的可能性，以形成可应用于传感技术和表面增强拉曼光谱（SERS）的纳米结构化表面。
