MOE Engineering Research Center of Smart Micro-Sensors and Micro-Systems, School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China.
Sensors (Basel). 2022 Nov 5;22(21):8534. doi: 10.3390/s22218534.
This study proposes an ultrahigh-sensitivity split-ring resonator-based microwave sensor for retrieving the complex permittivity of liquid samples. An interdigital capacitor structure was used to expand the sensing area and the sensitivity. A defected ground structure and A parallel dual split-ring resonator were introduced to improve the quality factor. A polydimethylsiloxane microfluidic channel substrate was placed above the interdigital capacitor structure. The channel route coincided with the interdigital gap to fully utilize the strong electric field. Ethanol-water solutions with varying ethanol fractions were injected into the channel as the testing liquid. It was demonstrated that the variation in resonant frequency can be used to retrieve the dielectric properties of liquid samples. The proposed sensor used a small liquid volume of ~0.68 μL and provided values in good agreement with the reference data.
本研究提出了一种基于超灵敏分裂环谐振器的微波传感器，用于获取液体样品的复介电常数。采用叉指电容结构来扩展传感面积和提高灵敏度。采用缺陷地结构和并平行双分裂环谐振器来提高品质因数。在叉指电容结构上方放置聚二甲基硅氧烷微流道基底。通道路径与叉指间隙重合，以充分利用强电场。将不同乙醇分数的乙醇-水溶液注入通道作为测试液体。结果表明，可以利用谐振频率的变化来获取液体样品的介电特性。所提出的传感器使用约 0.68 μL 的小液体体积，并提供与参考数据吻合较好的结果。
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