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用于气体传感的悬臂增强光声光谱法：不同位移检测方法的比较。

Cantilever-enhanced photoacoustic spectroscopy for gas sensing: A comparison of different displacement detection methods.

作者信息

Yin Yonggang, Ren Danyang, Li Chiye, Chen Ruimin, Shi Junhui

机构信息

Research Center for Humanoid Sensing, Zhejiang Laboratory, Hangzhou 311100, China.

出版信息

Photoacoustics. 2022 Oct 31;28:100423. doi: 10.1016/j.pacs.2022.100423. eCollection 2022 Dec.

DOI:10.1016/j.pacs.2022.100423
PMID:36386293
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9643576/
Abstract

Photoacoustic spectroscopy (PAS) combines the advantages of high sensitivity, high specificity and zero background, which is very suitable for trace gas detection. Cantilever-enhanced photoacoustic spectroscopy (CEPAS) utilizes highly sensitive mechanical cantilevers to further enhance the photoacoustic signal and shows a gas concentration detection limit of parts per trillion. This review is intended to summarize the recent advancements in CEPAS based on different displacement detection methods, such as Michelson interference, Fabry-Perot interference, light intensity detection, capacitive, piezoelectric and piezoresistive detection. Fundamental mechanisms and technical requirements of CEPAS are also provided in the literature. Finally, potential challenges and further opportunities are also discussed.

摘要

光声光谱法（PAS）结合了高灵敏度、高特异性和零背景的优点，非常适合痕量气体检测。悬臂增强光声光谱法（CEPAS）利用高灵敏度的机械悬臂进一步增强光声信号，其气体浓度检测限可达万亿分之一。本综述旨在总结基于不同位移检测方法（如迈克尔逊干涉、法布里-珀罗干涉、光强检测、电容式、压电式和压阻式检测）的CEPAS的最新进展。文献中还提供了CEPAS的基本机制和技术要求。最后，还讨论了潜在的挑战和进一步的机遇。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/545acfbca2b3/gr10.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/26ef8c08d08b/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/e2adf276b99d/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/d968d6d82bba/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/1a816518e4f8/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/9853d8e0a28f/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/2d05d59f740b/gr9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/545acfbca2b3/gr10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/ecb1051fc0bf/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/212d8b242609/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/a80a254ff00b/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/26ef8c08d08b/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/e2adf276b99d/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/d968d6d82bba/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/1a816518e4f8/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/9853d8e0a28f/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/2d05d59f740b/gr9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/225a/9643576/545acfbca2b3/gr10.jpg

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