Gu Liutao, Zhang Weiping, Lu Haolin, Wu Yuting, Fan Chongyang
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Rev Sci Instrum. 2022 Nov 1;93(11):115006. doi: 10.1063/5.0100376.
In this paper, we propose a novel, flower-like disk resonator (FDR). The structure is made up of concentrically meander-shaped rings that are interconnected by straight beams, which have the potential to provide lower resonant frequency, lower frequency split, higher quality factor (Q), and longer decay time (τ). In comparison to the traditional ring-like disk resonator (RDR), the FDR has better immunity to crystal orientation error and fabrication errors owing to its all-linear structure. The prototype of this design is manufactured by silicon on insulator fabrication technique. The frequency response test and quality factor test are implemented at room temperature and under vacuum (5 Pa) using a readout circuit with feed-through cancellation. The results show that the frequency split of the FDR is less than 7.7 Hz without electrostatic tuning. The Q and τ are 21 883 and 0.69 s, respectively. With the same structure parameters, the resonant frequency and frequency split are decreased by 39.1% and 70.2%, and the Q and τ are greatly improved by 63.8% and 172%, respectively, compared to the RDR.
在本文中，我们提出了一种新型的花状盘式谐振器（FDR）。该结构由同心蜿蜒形环组成，这些环由直梁相互连接，这有可能提供更低的谐振频率、更低的频率分裂、更高的品质因数（Q）和更长的衰减时间（τ）。与传统的环状盘式谐振器（RDR）相比，FDR由于其全线性结构，对晶体取向误差和制造误差具有更好的免疫力。该设计的原型采用绝缘体上硅制造技术制造。频率响应测试和品质因数测试在室温及真空（5 Pa）条件下，使用具有馈通抵消功能的读出电路进行。结果表明，在没有静电调谐的情况下，FDR的频率分裂小于7.7 Hz。Q和τ分别为21883和0.69 s。与RDR相比，在相同结构参数下，FDR的谐振频率和频率分裂分别降低了39.1%和70.2%，而Q和τ分别大幅提高了63.8%和172%。
