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基于回音壁模式谐振器的微光机电系统陀螺仪的优化与制造

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator.

作者信息

Xia Dunzhu, Zhang Bing, Wu Hao, Wu Tao

机构信息

School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Huaihai Industries Group, Changzhi 046000, China.

出版信息

Sensors (Basel). 2020 Dec 18;20(24):7264. doi: 10.3390/s20247264.

DOI:10.3390/s20247264
PMID:33352871
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7767161/
Abstract

In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adjusting key parameters, such as the cavity radius, the waveguide width, and the gap between them for silicon and silicon nitride materials in simulations, which will greatly affect the quality factor (Q) of the WGM resonator. Furthermore, the structural parameters of the disk resonant gyroscope were also optimized. Then, the fabrication process was optimized to overcome the difficulties in the realization of micro-optical devices. Finally, a gyroscope prototype with the integrated WGM resonator was verified experimentally. The scale factor and bias instability performance of the MOEMS gyroscope was 2.63 mv/°/s and 4.0339°/h, respectively.

摘要

本文研究了一种应用于新型微光机电系统（MOEMS）陀螺仪的回音壁模式（WGM）谐振器的特性。通过在模拟中调整关键参数，如硅和氮化硅材料的腔半径、波导宽度以及它们之间的间隙，对WGM光传输耦合模型进行了分析和比较，这些参数将极大地影响WGM谐振器的品质因数（Q）。此外，还对盘式谐振陀螺仪的结构参数进行了优化。然后，优化了制造工艺以克服微光学器件实现中的困难。最后，通过实验验证了集成WGM谐振器的陀螺仪原型。该MOEMS陀螺仪的比例因子和偏置不稳定性性能分别为2.63 mv/°/s和4.0339°/h。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/93cab03218ca/sensors-20-07264-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/1c367fb5ebdd/sensors-20-07264-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/10288f4e9686/sensors-20-07264-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/7b3b0d1639b4/sensors-20-07264-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/5c75c82b6006/sensors-20-07264-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f7d/7767161/f7422a521fcd/sensors-20-07264-g021.jpg
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本文引用的文献

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Analysis of Kerr Noise in Angular-Rate Sensing Based on Mode Splitting in a Whispering-Gallery-Mode Microresonator.基于回音壁模式微谐振器中模式分裂的角速率传感中的克尔噪声分析
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