Bolocan Vlad, Valsan Dragos, Ercuta Aurel, Craciunescu Corneliu-Marius
Department of Materials and Manufacturing Engineering, Faculty of Mechanical Engineering, Politehnica University Timisoara, P-ta Victoriei nr., 30332 Timisoara, Romania.
Technical Sciences Academy of Romania, Bulevardul Dacia 26, 030167 Bucharest, Romania.
Nanomaterials (Basel). 2022 Nov 26;12(23):4207. doi: 10.3390/nano12234207.
The generation of microactuation using narrow thermal hysteresis Ti-Ni-Cu shape-memory alloy films deposited on non-metallic substrates as the active element is studied based on a model previously developed for Ni-Ti/Si bimorphs. To this end, the compositional range in which the B2 (monoclinic) → B19 (orthorhombic) martensitic phase transformation occurs was considered, and films were deposited by magnetron sputtering on heated Si and Kapton substrates. Ultra-fine grains were observed for the 550 °C deposition temperature. The selected composition was close to TiNiCu, so the narrowing of the thermal hysteresis is not associated with a significant reduction in shape recovery capability. The microstructure and composition of the target materials and as-deposited films used in our experiments were characterized by X-ray diffraction and scanning electron microscopy, whereas the temperature dependence of the volume fraction of the martensite phase was derived using differential scanning calorimetry records for the target materials and from the temperature dependence of the electrical resistance data for the films. An original model was used to predict the actuation of cantilever-type bimorphs with Kapton and Si substrates.
基于先前为镍钛/硅双压电晶片开发的模型，研究了以沉积在非金属衬底上的具有窄热滞的钛镍铜形状记忆合金薄膜作为有源元件产生微驱动的情况。为此，考虑了发生B2（单斜）→B19（斜方）马氏体相变的成分范围，并通过磁控溅射在加热的硅和聚酰亚胺衬底上沉积薄膜。在550℃的沉积温度下观察到了超细晶粒。所选成分接近TiNiCu，因此热滞的变窄与形状恢复能力的显著降低无关。通过X射线衍射和扫描电子显微镜对我们实验中使用的靶材和沉积态薄膜的微观结构和成分进行了表征，而马氏体相体积分数的温度依赖性则通过靶材的差示扫描量热法记录以及薄膜电阻数据的温度依赖性得出。使用一个原始模型来预测具有聚酰亚胺和硅衬底的悬臂式双压电晶片的驱动情况。
