School of Electronic and Information Engineering, Jeonbuk National University, Jeonju 54896, Republic of Korea.
Division of Electronic Engineering, Jeonbuk National University, Jeonju 54896, Republic of Korea.
Sensors (Basel). 2022 Dec 5;22(23):9490. doi: 10.3390/s22239490.
In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage.
在这项研究中，设计了一种使用空心方形电极的静电驱动垂直 MEMS 致动器。为了实现垂直致动，在玻璃衬底上设计了空心方形电极。利用包含台阶的硅压重在没有拉入的情况下实现模拟致动。垂直 MEMS 致动器采用 SiOG（玻璃上的硅）工艺制造，总致动器尺寸为 8.3mm×8.3mm。由于有 8 个宽度为 30μm 的蛇形弹簧，制造的压重在结构上是悬空的。MEMS 致动器的垂直运动已成功通过静电控制。在顶部硅结构和空心方形电极之间施加 40V 电压时，测量到的垂直运动为 5.6μm。这里显示的结果证实，所提出的 MEMS 致动器能够使用施加的电压来控制垂直位移。
