Nguyen Thi Hao Nhi, Koompai Natnicha, Turpaud Victor, Montesinos-Ballester Miguel, Peltier Jonathan, Frigerio Jacopo, Ballabio Andrea, Giani Raffaele, Coudevylle Jean-René, Villebasse Cédric, Bouville David, Alonso-Ramos Carlos, Vivien Laurent, Isella Giovanni, Marris-Morini Delphine
Opt Express. 2022 Dec 19;30(26):47093-47102. doi: 10.1364/OE.476164.
Spectroscopy in the mid-infrared (mid-IR) wavelength range is a key technique to detect and identify chemical and biological substances. In this context, the development of integrated optics systems paves the way for the realization of compact and cost-effective sensing systems. Among the required devices, an integrated electro-optical modulator (EOM) is a key element for advanced sensing circuits exploiting dual comb spectroscopy. In this paper, we have experimentally demonstrated an integrated EOM operating in a wide wavelength range, i.e. from 5 to 9 µm at radio frequency (RF) as high as 1 GHz. The modulator exploits the variation of free carrier absorption in a Schottky diode embedded in a graded silicon germanium (SiGe) photonic waveguide.
中红外（mid-IR）波长范围内的光谱学是检测和识别化学及生物物质的关键技术。在此背景下，集成光学系统的发展为实现紧凑且经济高效的传感系统铺平了道路。在所需要的器件中，集成电光调制器（EOM）是利用双梳光谱的先进传感电路的关键元件。在本文中，我们通过实验证明了一种集成EOM，其在高达1 GHz的射频（RF）下可在5至9 µm的宽波长范围内工作。该调制器利用嵌入渐变硅锗（SiGe）光子波导中的肖特基二极管中自由载流子吸收的变化。
