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集成PIN调制器和光电探测器，工作在5.5微米至10微米的中红外波段。

Integrated PIN modulator and photodetector operating in the mid-infrared range from 5.5 μm to 10 μm.

作者信息

Nguyen Thi Hao Nhi, Turpaud Victor, Koompai Natnicha, Peltier Jonathan, Calcaterra Stefano, Isella Giovanni, Coudevylle Jean-René, Alonso-Ramos Carlos, Vivien Laurent, Frigerio Jacopo, Marris-Morini Delphine

机构信息

Université Paris-Saclay, Centre de Nanosciences et de Nanotechnologies, 91120 Palaiseau, France.

L-NESS, Dipartimento di Fisica, Politechnico di Milano, Polo di Como, Via Anzani 42, 22100 Como, Italy.

出版信息

Nanophotonics. 2024 Jan 11;13(10):1803-1813. doi: 10.1515/nanoph-2023-0692. eCollection 2024 Apr.

DOI:10.1515/nanoph-2023-0692
PMID:39635610
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11501649/
Abstract

This study reports the experimental demonstration of the first waveguide-integrated SiGe modulator using a PIN diode operating in a wide spectral range of the mid-infrared region. At the wavelength of 10 µm, an extinction ratio up to 10 dB is obtained in injection regime and 3.2 dB in depletion regime. High speed operation is obtained, up to 1.5 GHz. Furthermore, the device can also operate as an integrated photodetector. Photodetection has thus been characterized from 5.2 µm to 10 µm wavelengths showing an internal responsivity around 1 mA/W, and a 3 dB electro-optical bandwidth of 32 MHz. These results show a significant advancement in integrated photodetectors and electro-optical modulators for mid-infrared spectroscopy.

摘要

本研究报告了首个采用PIN二极管的波导集成硅锗调制器在中红外区域宽光谱范围内的实验演示。在10 µm波长处，注入模式下的消光比高达10 dB，耗尽模式下为3.2 dB。实现了高达1.5 GHz的高速运行。此外，该器件还可作为集成光电探测器工作。因此，已对5.2 µm至10 µm波长范围内的光探测进行了表征，显示出约1 mA/W的内部响应度以及32 MHz的3 dB电光带宽。这些结果表明，用于中红外光谱的集成光电探测器和电光调制器取得了重大进展。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/e72bfc8cd4bb/j_nanoph-2023-0692_fig_010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/2f5033e2fc77/j_nanoph-2023-0692_fig_001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/92b3b93777f2/j_nanoph-2023-0692_fig_002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/c2bc22b7ecac/j_nanoph-2023-0692_fig_003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/7214aedd5e99/j_nanoph-2023-0692_fig_004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/dfe09421e51b/j_nanoph-2023-0692_fig_005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/ec8f818ac6e9/j_nanoph-2023-0692_fig_006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/56bd765adf63/j_nanoph-2023-0692_fig_007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/dd52fb00f272/j_nanoph-2023-0692_fig_008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/94100932cbe9/j_nanoph-2023-0692_fig_009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/e72bfc8cd4bb/j_nanoph-2023-0692_fig_010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/2f5033e2fc77/j_nanoph-2023-0692_fig_001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/92b3b93777f2/j_nanoph-2023-0692_fig_002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/c2bc22b7ecac/j_nanoph-2023-0692_fig_003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/7214aedd5e99/j_nanoph-2023-0692_fig_004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/dfe09421e51b/j_nanoph-2023-0692_fig_005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/ec8f818ac6e9/j_nanoph-2023-0692_fig_006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/56bd765adf63/j_nanoph-2023-0692_fig_007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/dd52fb00f272/j_nanoph-2023-0692_fig_008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/94100932cbe9/j_nanoph-2023-0692_fig_009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a82f/11501649/e72bfc8cd4bb/j_nanoph-2023-0692_fig_010.jpg

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