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超高速局部微纳米水膜蒸发传热测量。

Ultrahigh evaporative heat transfer measured locally in submicron water films.

机构信息

Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA, 15213, USA.

出版信息

Sci Rep. 2022 Dec 26;12(1):22353. doi: 10.1038/s41598-022-26182-2.

Abstract

Thin film evaporation is a widely-used thermal management solution for micro/nano-devices with high energy densities. Local measurements of the evaporation rate at a liquid-vapor interface, however, are limited. We present a continuous profile of the evaporation heat transfer coefficient ([Formula: see text]) in the submicron thin film region of a water meniscus obtained through local measurements interpreted by a machine learned surrogate of the physical system. Frequency domain thermoreflectance (FDTR), a non-contact laser-based method with micrometer lateral resolution, is used to induce and measure the meniscus evaporation. A neural network is then trained using finite element simulations to extract the [Formula: see text] profile from the FDTR data. For a substrate superheat of 20 K, the maximum [Formula: see text] is [Formula: see text] MW/[Formula: see text]-K at a film thickness of [Formula: see text] nm. This ultrahigh [Formula: see text] value is two orders of magnitude larger than the heat transfer coefficient for single-phase forced convection or evaporation from a bulk liquid. Under the assumption of constant wall temperature, our profiles of [Formula: see text] and meniscus thickness suggest that 62% of the heat transfer comes from the region lying 0.1-1 μm from the meniscus edge, whereas just 29% comes from the next 100 μm.

摘要

薄膜蒸发是一种广泛应用于高能量密度微/纳器件的热管理解决方案。然而,液体-蒸汽界面处蒸发速率的局部测量受到限制。我们通过机器学习对物理系统的替代物解释,得到了在水弯月面亚微米薄膜区域内蒸发传热系数 ([Formula: see text]) 的连续分布。频域热反射 (FDTR) 是一种基于激光的非接触式方法,具有亚微米级的横向分辨率,用于诱导和测量弯月面蒸发。然后,使用有限元模拟训练神经网络,从 FDTR 数据中提取 [Formula: see text] 分布。对于基底过热度为 20 K 的情况,在薄膜厚度为 [Formula: see text] nm 时,最大 [Formula: see text] 为 [Formula: see text] MW/[Formula: see text]-K。这个超高的 [Formula: see text] 值比单相强制对流或从体相液体蒸发的传热系数大两个数量级。在假设壁面温度恒定的情况下,我们的 [Formula: see text] 和弯月面厚度分布表明,62%的热量来自距弯月面边缘 0.1-1 μm 的区域,而只有 29%来自接下来的 100 μm。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3e11/9792458/85659cd416cb/41598_2022_26182_Fig1_HTML.jpg

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