Ni Jing, Lou Bokai, Cui Zhi, He Lihua, Zhu Zefei
School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Materials (Basel). 2022 Dec 30;16(1):372. doi: 10.3390/ma16010372.
Polytetrafluoroethylene (PTFE) is extensively used in equipment used for manufacturing semiconductor components and wet etching equipment. However, achieving ideal dimensional accuracy when cutting PTFE is challenging. In this study, we performed cutting experiments using a curvilinear tool and analyzed cutting force, cutting temperature, groove width, and surface roughness in PTFE grooving. The results indicated that the cutting force was most notably affected by the feed rate in Stage I of grooving. The rate of change in cutting force was the largest in Stage II because of the increase in the tool contact area. In Stage III, the shear area of the rake face was the largest, and the cutting force tended to be stable. The groove width was measured with a minimum error rate of 0.95% at a feed rate of 0.05 mm/rev. Moreover, the groove exhibited a time-independent springback. The minimum groove surface roughness was 0.586 at a feed rate of 0.05 mm/rev. The ideal feed rate was 0.05 mm/rev with groove width, surface quality, and chip curl as the key parameters. The processing parameters obtained in this study can be applied to actual production for the optimization of manufacturing accuracy.
聚四氟乙烯（PTFE）广泛应用于制造半导体元件的设备和湿法蚀刻设备中。然而，切割PTFE时要达到理想的尺寸精度具有挑战性。在本研究中，我们使用曲线刀具进行了切割实验，并分析了PTFE开槽过程中的切削力、切削温度、槽宽和表面粗糙度。结果表明，在开槽的第一阶段，切削力受进给速度的影响最为显著。由于刀具接触面积的增加，切削力在第二阶段的变化率最大。在第三阶段，前刀面的剪切面积最大，切削力趋于稳定。在进给速度为0.05mm/rev时，槽宽测量的最小误差率为0.95%。此外，槽表现出与时间无关的回弹。在进给速度为0.05mm/rev时，槽的最小表面粗糙度为0.586。以槽宽、表面质量和切屑卷曲为关键参数，理想的进给速度为0.05mm/rev。本研究获得的加工参数可应用于实际生产，以优化制造精度。
