Lu Ya, Lin Chaoran, Guo Minghui, Rong Youmin, Huang Yu, Wu Congyi
State Key Lab of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China.
School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines (Basel). 2022 Dec 29;14(1):90. doi: 10.3390/mi14010090.
In this research, effects of ambient temperature (-100 °C-200 °C) on nanosecond laser micro-drilling of polydimethylsiloxane (PDMS) was investigated by simulation and experiment. A thermo-mechanical coupled model was established, and it was indicated that the top and bottom diameter of the micro-hole decreased with the decrease of the ambient temperature, and the micro-hole taper increased with the decrease of the ambient temperature. The simulation results showed a good agreement with the experiment results in micro-hole geometry; the maximum prediction errors of the top micro-hole diameter, the bottom micro-hole diameter and micro-hole taper were 2.785%, 6.306% and 9.688%, respectively. The diameter of the heat-affected zone decreased with the decrease of the ambient temperature. The circumferential wrinkles were controlled by radial compressive stress. As the ambient temperature increased from 25 °C to 200 °C, the radial compressive stress gradually decreased, which led to the circumferential wrinkles gradually evolving in the radial direction. This work provides a new idea and method based on ambient temperature control for nanosecond laser processing of PDMS, which provides exciting possibilities for a wider range of engineering applications of PDMS.
本研究通过模拟和实验研究了环境温度（-100℃至200℃）对聚二甲基硅氧烷（PDMS）纳秒激光微钻孔的影响。建立了热-机械耦合模型，结果表明，微孔的顶部和底部直径随环境温度的降低而减小，微孔锥度随环境温度的降低而增大。模拟结果与微孔几何形状的实验结果吻合良好；顶部微孔直径、底部微孔直径和微孔锥度的最大预测误差分别为2.785%、6.306%和9.688%。热影响区的直径随环境温度的降低而减小。周向皱纹由径向压应力控制。随着环境温度从25℃升高到200℃，径向压应力逐渐减小，导致周向皱纹沿径向逐渐演变。这项工作为基于环境温度控制的PDMS纳秒激光加工提供了新的思路和方法，为PDMS更广泛的工程应用提供了令人兴奋的可能性。
