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硼掺杂硅纳米晶多层中的类金属载流子输运和莫特跳跃传导行为的实验观察。

Experimental observations on metal-like carrier transport and Mott hopping conduction behaviours in boron-doped Si nanocrystal multilayers.

机构信息

School of Electrical Science and Engineering, Collaborative Innovation Center of Advanced Microstructures, Jiangsu Provincial Key Laboratory of Advanced Photonic and Electrical Materials, Nanjing University, Nanjing, 210000, People's Republic of China.

ZJU-Hangzhou Global Scientific and Technological Innovation Center, School of Materials Science and Engineering, Zhejiang University, 311200, Hangzhou, People's Republic of China.

出版信息

Nanotechnology. 2023 Feb 9;34(16). doi: 10.1088/1361-6528/acb652.

Abstract

Studies on the carrier transport characteristics of semiconductor nanomaterials are the important and interesting issues which are helpful for developing the next generation of optoelectronic devices. In this work, we fabricate B-doped Si nanocrystals/SiOmultilayers by plasma enhanced chemical vapor deposition with subsequent high temperature annealing. The electronic transport behaviors are studied via Hall measurements within a wide temperature range (30-660 K). It is found that when the temperature is above 300 K, all the B-doped Si nanocrystals with the size near 4.0 nm exhibit the semiconductor-like conduction characteristics, while the conduction of Si nanocrystals with large size near 7.0 nm transforms from semiconductor-like to metal-like at high B-doping ratios. The critical carrier concentration of conduction transition can reach as high as 2.2 × 10cm, which is significantly higher than that of bulk counterpart and may be even higher for the smaller Si nanocrystals. Meanwhile, the Mott variable-range hopping dominates the carrier transport when the temperature is below 100 K. The localization radius of carriers can be regulated by the B-doping ratios and Si NCs size, which is contributed to the metallic insulator transition.

摘要

研究半导体纳米材料的载流子输运特性是一个重要且有趣的问题,有助于开发下一代光电器件。在这项工作中,我们通过等离子体增强化学气相沉积法制备了掺硼硅纳米晶/SiO 多层膜,随后进行了高温退火。通过霍尔测量在很宽的温度范围内(30-660 K)研究了电子输运行为。结果发现,当温度高于 300 K 时,所有尺寸接近 4.0nm 的掺硼硅纳米晶都表现出半导体的输运特性,而尺寸接近 7.0nm 的硅纳米晶的输运特性则由半导体转变为金属,在高掺杂比下。载流子输运转变的临界载流子浓度可高达 2.2×10cm,明显高于体相值,对于较小的硅纳米晶,甚至可能更高。同时,当温度低于 100 K 时,载流子输运由莫特变程跳跃主导。载流子的局域化半径可以通过掺杂比和 SiNCs 的尺寸来调节,这有助于金属-绝缘体转变。

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