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硼掺杂锗纳米晶体薄膜的电学性质

The electronic properties of boron-doped germanium nanocrystals films.

作者信息

Shan Dan, Wang Menglong, Sun Daoyuan, Cao Yunqing

机构信息

School of Information Engineering, Yangzhou Polytechnic Institute, Yangzhou, 225127, China.

School of Physical Science and Technology/Microelectronics Industry Research Institute, Yangzhou University, Yangzhou, 225009, China.

出版信息

Discov Nano. 2023 Sep 7;18(1):110. doi: 10.1186/s11671-023-03893-7.

Abstract

Various doping concentrations of boron (B)-doped germanium nanocrystal (Ge NC) films were prepared using the plasma-enhanced chemical vapor deposition (PECVD) technique followed by thermal annealing treatment. The electronic properties of B-doped Ge NCs films combined with the microstructural characterization were investigated. It is worthwhile mentioning that the Hall mobilities [Formula: see text] of Ge NCs films were enhanced after B doping and reached to the maximum of 200 cm V, which could be ascribed to the reduction in surface defects states in the B-doped films. It is also important to highlight that the temperature-dependent mobilities [Formula: see text] exhibited different temperature dependence trends in the Ge NCs films before and after B doping. A comprehensive investigation was conducted to examine the distinct carrier transport properties in B-doped Ge NC films, and a detailed discussion was presented, focusing on the scattering mechanisms involved in the transport process.

摘要

采用等离子体增强化学气相沉积(PECVD)技术制备了不同掺杂浓度的硼(B)掺杂锗纳米晶(Ge NC)薄膜,随后进行热退火处理。研究了B掺杂Ge NC薄膜的电子性质,并结合微观结构表征进行了分析。值得一提的是,B掺杂后Ge NC薄膜的霍尔迁移率[公式:见原文]得到提高,达到最大值200 cm V,这可归因于B掺杂薄膜表面缺陷态的减少。同样重要的是要强调,B掺杂前后Ge NC薄膜中与温度相关的迁移率[公式:见原文]呈现出不同的温度依赖性趋势。对B掺杂Ge NC薄膜中独特的载流子输运性质进行了全面研究,并进行了详细讨论,重点关注输运过程中涉及的散射机制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cdde/10484877/42101ae065c1/11671_2023_3893_Fig1_HTML.jpg

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